Computer graphical status display

• US 6,031,547 A
• Filed: 11/10/1997
• Issued: 02/29/2000
• Est. Priority Date: 11/10/1997
• Status: Expired due to Term

• Current Assignee: Lam Research Corporation
• Original Assignee: Lam Research Corporation
• Inventors: Kennedy, Robert D.
• Primary Examiner(s): Zimmerman, Mark K.
• Application Number:
  US08/966,886
• Time in Patent Office: 841 Days
• Field of Search: 345/440, 345/140
• US Class Current: 345/440
• CPC Class Codes: G06T 11/206 Drawing of charts or graphs

Abstract

A computer graphical status display for use in displays that monitor manufacturing processes having a plurality of process parameters provides a group of bar graphs placed in a side-by-side arrangement. The bar graphs are all scaled so that they have a common baseline value. When all process parameters are displayed at their baseline value, all graphs will have tops that are in alignment with the baseline. If a deviation of a graph beyond a predetermined threshold occurs, a visible warning section extending between the baseline and the top is displayed. Alphanumeric and other data can be provided to each of the graphs and the graphs can be arranged in groupings according to similar units of measure or similar process steps.

Claims

1. A computer graphical status display for use in displays that monitor manufacturing processes in which a plurality of discrete process parameters exist, comprising:

a plurality of bar graphs each being parallel to each other and extending from a common origin to a top, each of the bar graphs representing a respective of the plurality of discrete process parameter values, each of the process parameter values having a respective of a plurality of desired baseline values, and each of the bar graphs being scaled so that each of the baseline values is located at an equal distance to the other of the baseline values from the origin; and

an alarm indication which is triggered when an individual bar graph falls below or above a minimum or a maximum permissible value for that parameter, respectively, wherein the alarm indication comprises a warning section extending from the baseline to an actual measured value for an out-of-range parameter bar graph defined by at least one of a color and or pattern that differs from a color and or pattern of a portion of the bar graph extending between the origin and the warning section.

2. The computer graphical status display as set forth in claim 1 further comprising alphanumeric information identifying the respective of the process parameters located adjacent respective of the bar graphs.

3. The computer graphical status display as set forth in claim 2 wherein selected of the plurality of bar graphs are organized adjacent each other in a predetermined grouping, the predetermined grouping being based upon predetermined standards.

4. The computer graphical status display as set forth in claim 3 wherein the predetermined standards comprise units of value.

5. The computer graphical status display as set forth in claim 1 further comprising a threshold section defining accepted minimum and maximum permissible values for each of the discrete process parameters, wherein the bar graph remains free of the warning indication while the top of the bar graph remains in the threshold section.

6. The computer graphical status display as set forth in claim 5 further comprising alphanumeric information identifying the respective of the process parameters located adjacent respective of the bar graphs.

7. The computer graphical status display as set forth in claim 6 wherein selected of the plurality of bar graphs are organized adjacent each other in a predetermined grouping, the predetermined grouping being based upon predetermined standards.

8. The computer graphical status display as set forth in claim 7 wherein the predetermined standards comprise units of value.

9. The computer graphical status display as set forth in claim 7 wherein the plurality of discrete process parameter values have units of measure that are unrelated.

10. The computer graphical status display as set forth in claim 5 wherein the threshold section is equidistant for each of the process parameters.

11. The computer graphical status display as set forth in claim 5 wherein the threshold section varies for each of the process parameters.

12. The computer graphical status display as set forth in claim 5 wherein the alarm indication further comprises a flag.

13. The computer graphical status display as set forth in claim 5 wherein the alarm indication further comprises an audible tone.

14. The computer graphical status display as set forth in claim 13 wherein the audible tone is a buzzer.

15. The computer graphical status display as set forth in claim 5 wherein the alarm indication further comprises a flashing section of bar graph.

16. The computer graphical status display as set forth in claim 5 wherein an alarm indication results in an automatic shutdown of equipment.

17. The computer graphical status display as set forth in claim 1 wherein the alarm indication further comprises a flashing section of a bar graph.

18. The computer graphical status display as set forth in claim 1 wherein an alarm indication results in an automatic shutdown of equipment.