Apparatus and methods for contour measurement using movable sources
First Claim
1. A method for determining, on an object having a surface, three-dimensional position information of a point on said surface of said object, said method comprising the steps of:
- providing two sources of radiation separated by a distance, said sources being coherent with respect to one another;
illuminating said point on said surface of said object with said radiation from each of said sources;
moving each of said sources relative to each other;
detecting radiation scattered by said point on said surface of said object; and
calculating position information in response to said movement of said sources and said detected radiation scattered by said point on said surface of said object.
2 Assignments
0 Petitions
Accused Products
Abstract
Apparatus and methods of measuring position information of a point on the surface of an object. In one embodiment, the apparatus includes two sources of radiation positioned to illuminate the point on the surface of the object with radiation from each of the sources. The radiation from each of the sources is coherent with respect to the radiation from the other source. A control system moves each of the sources relative to the other and changes the phase of the radiation from at least one of the sources relative to the phase of the radiation from the other source as measured at the point on the surface of the object. A detector is positioned to receive radiation scattered by the point and a processor in communication with the detector calculates position information in response to the change in phase of the radiation from the source and the received radiation scattered by the point on the surface of the object.
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Citations
31 Claims
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1. A method for determining, on an object having a surface, three-dimensional position information of a point on said surface of said object, said method comprising the steps of:
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providing two sources of radiation separated by a distance, said sources being coherent with respect to one another; illuminating said point on said surface of said object with said radiation from each of said sources; moving each of said sources relative to each other; detecting radiation scattered by said point on said surface of said object; and calculating position information in response to said movement of said sources and said detected radiation scattered by said point on said surface of said object. - View Dependent Claims (2, 3, 4, 5)
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6. An apparatus for determining, on an object having a surface, position information of a point on said surface of said object, said apparatus comprising:
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two sources of radiation separated by a distance, said sources being coherent with respect to one another; a control system moving each of said sources relative to each other; a detector positioned to receive radiation scattered from said point on said surface of said object; and a processor receiving signals from said detector, said processor calculating position information in response to said movement of said sources and said received radiation scattered from said point on said surface of said object. - View Dependent Claims (7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21)
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22. A method for determining, on an object having a surface, position information of a point on said surface of said object, said method comprising the steps of:
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providing two sources of radiation separated by a distance, said sources being coherent with respect to one another; providing a detector at said point on said surface; illuminating said point on said surface of said object with said radiation from each of said sources; moving each of said sources relative to each other; detecting said radiation at said point on said surface of said object; and calculating position information in response to said movement of said sources and said radiation detected at said point on said surface of said object. - View Dependent Claims (23, 24, 25, 26)
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27. An apparatus for determining, on an object having a surface, a depth coordinate of a point on said surface of said object, said apparatus comprising:
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two sources of radiation separated by a distance, said sources being coherent with respect to one another; a control system moving each of said sources relative to each other; a detector positioned at said point on said surface of said object to receive radiation illuminating said point on said surface of said object; and a processor receiving signals from said detector, said processor calculating position information of said point on said surface of said object in response to said movement of said sources and said radiation received at said point on said surface of said object. - View Dependent Claims (28, 29, 30, 31)
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Specification