Low-cost thin-metal-film interference filters

• US 6,031,653 A
• Filed: 08/27/1998
• Issued: 02/29/2000
• Est. Priority Date: 08/28/1997
• Status: Expired due to Term

• Current Assignee: California Institute of Technology
• Original Assignee: California Institute of Technology
• Inventors: Wang, Yu
• Primary Examiner(s): Ben, Loha
• Application Number:
  US09/141,843
• Time in Patent Office: 551 Days
• Field of Search: 359/247, 359/290, 359/291, 359/618, 359/722, 359/577, 359/580, 359/582, 359/586, 359/589, 359/359, 359/360, 428/403, 428/402
• US Class Current: 359/247
• CPC Class Codes: G02B 26/001 based on interference in an adjustable optical cavity interference filters G02B5/28; devices or arrangements using multiple reflections in spectrometry or monochromators G01J3/26
• CPC Class Codes: G02B 26/02 for controlling the intensity of light G02B26/004 takes precedence
• CPC Class Codes: G02B 5/288 comprising at least one thin film resonant cavity, e.g. in bandpass filters
• CPC Class Codes: Y10T 428/2991 Coated

Abstract

Interference filters and filter arrays based on thin-metal film interference filters having at least one dielectric layer formed between two thin-metal films to form a Fabry-Perot cavity.

Claims

1. A filter for filtering electromagnetic radiation, comprising:

a dielectric layer having a first side and an opposite second side and having a selected thickness measured from said first side to said second side; and

first and second metal films respectively disposed on said first and second sides of said dielectric layer to form an optical cavity enclosing said dielectric layer, said first and second metal films having a thickness less than a penetration depth of the radiation,

wherein said optical cavity is operable to transmit radiation at a selected wavelength with a predetermined bandwidth, and said dielectric layer, said first and second metal films are configured to have a total optical thickness greater than one half of said selected wavelength and less than said selected wavelength.

2. The filter as in claim 1, wherein an optical thickness of said dielectric layer is adjustable to change said selected wavelength.

3. The filter as in claim 2, further comprising:

first and second transparent substrates on which said first and second metal films are respectively formed, wherein said dielectric layer is an air gap between said first and second metal films; and

a piezo-electric element engaged to said first and second transparent substrates and operable to change a spacing therebetween in response to a control electrical signal, thereby changing said selected thickness of said air gag to tune said selected wavelength.

4. The filter as in claim 3, wherein said first and second metal films include silver for transmission in the visible spectral range.

5. The filter as in claim 3, wherein said first and second metal films include potassium for transmission in the infrared spectral range.

6. The filter as in claim 2, wherein said dielectric layer is formed of an opto-electric material whose index of refraction varies with a control electrical signal.

7. An optical filter for transmitting a selected spectral component in an input optical beam, comprising:

a first metal layer configured to have a thickness less than a penetration depth for said input optical beam;

a first dielectric layer formed on said first metal layer;

a second metal layer formed on said first dielectric layer and configured to have a thickness less than a penetration depth for said input light beam;

a second dielectric layer formed on said second metal layer; and

a third metal layer formed on said second dielectric layer and configured to have a thickness less than a penetration depth for said input light beam,

wherein said first and second dielectric layers are configured to allow for transmission of said selected spectral component.

8. The optical filter as in claim 7, wherein said first and third metal layers have a thickness less than a thickness of said second metal layer.

9. The optical filter as in claim 7, wherein said first, second and third metal layers are formed of silver and are less than about 100 nm thick.

10. The optical filter as in claim 7, wherein said first and second dielectric layers are formed of MgF₂, SiO₂, NaF, or LiF.

11. An optical filter for filtering a white input beam to produce a colored transmitted beam, comprising an array of filter elements disposed relative to one another and formed on a substrate, each filter element comprising three adjacent color filters formed of a stack of alternating metal layers and dielectric layers on said substrate for transmitting different colors, wherein each color filter includes:

a first metal layer formed on said substrate and configured to have a thickness less than a penetration depth for said input beam;

a first dielectric layer formed on said first metal layer;

a second metal layer formed on said first dielectric layer and configured to have a thickness less than a penetration depth for said input beam;

a second dielectric layer formed on said second metal layer; and

a third metal layer formed on said second dielectric layer and configured to have a thickness less than a penetration depth for said input beam,

wherein said first and second dielectric layers are configured to allow for transmission of a selected spectral component in said input beam.

12. The optical filter as in claim 11, wherein said first and third metal layers in different color filters have a first thickness, said second metal layers in different color filters have a second thickness, and said dielectric layers in different color filters have different thickness values.

13. The optical filter as in claim 11, wherein said substrate includes an array of spatial light modulators.