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Beam-addressed micromirror direct view display

  • US 6,031,656 A
  • Filed: 10/28/1998
  • Issued: 02/29/2000
  • Est. Priority Date: 10/28/1998
  • Status: Expired due to Term
First Claim
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1. A flat-panel direct-view display, comprising:

  • a background;

    an array of electrostatically-actuated cantilevered micromirrors on a substrate in front of said background, said micromirrors having a hinge that is capable of deflecting the micromirror over a range from a first state in which the micromirror covers a portion of the background to a second state in which the micromirror uncovers a substantial majority of said portion of the background;

    a reference surface; and

    a flat-panel source that addresses either said array of micromirrors or said reference surface with a plurality of electron beams a row at a time while the other is held at a reference potential to modulate the potential difference between each said micromirror and said reference surface and thereby adjust the deflection of said micromirrors over said range to produce a direct-view image.

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