Beam-addressed micromirror direct view display

• US 6,031,656 A
• Filed: 10/28/1998
• Issued: 02/29/2000
• Est. Priority Date: 10/28/1998
• Status: Expired due to Term

• Current Assignee: Micron Technology, Inc.
• Original Assignee: Memsolutions, Inc.
• Inventors: Little, Michael J., Robinson, William P.
• Primary Examiner(s): Epps, Georgia
• Assistant Examiner(s): Burke, Margaret
• Application Number:
  US09/179,933
• Time in Patent Office: 489 Days
• Field of Search: 359/227, 359/230, 359/293, 313/309, 315/366, 348/795, 348/781, 348/782, 348/740
• US Class Current: 359/293
• CPC Class Codes: G02B 26/0841 the reflecting element being moved or deformed by electrostatic means

Abstract

A flat-panel direct view display positions an array of electrostatically-actuated cantilevered micromirrors in front of a contrasting background and opposite a flat-panel electron beam source. Depending upon the display configuration, the electron beam source addresses either the array of micromirrors or a reference surface a row at a time while the other is held at a reference potential. The electron beams modulate the potential difference between each micromirror and the reference surface thereby adjusting the magnitude of the attractive electrostatic force between the two. This in turn modulates the deflection of the micromirrors between their quiescent and fully actuated states to selectively cover and uncover the background thereby producing a grey scale direct-view image.

Claims

1. A flat-panel direct-view display, comprising:

a background;

an array of electrostatically-actuated cantilevered micromirrors on a substrate in front of said background, said micromirrors having a hinge that is capable of deflecting the micromirror over a range from a first state in which the micromirror covers a portion of the background to a second state in which the micromirror uncovers a substantial majority of said portion of the background;

a reference surface; and

a flat-panel source that addresses either said array of micromirrors or said reference surface with a plurality of electron beams a row at a time while the other is held at a reference potential to modulate the potential difference between each said micromirror and said reference surface and thereby adjust the deflection of said micromirrors over said range to produce a direct-view image.

2. The flat-panel direct-view display of claim 1, wherein said micromirror deflects approximately 90 degrees between said first and second states.

3. The flat-panel direct-view display of claim 1, wherein said first state is the hinge'"'"'s quiescent state and said second state is its filly actuated state.

4. The flat-panel direct-view display of claim 1, wherein each said micromirror has opposing light absorbing and light reflecting surfaces, said light absorbing surface absorbing incident light when said micromirror is in said first state and said light reflecting surface reflecting incident light to the background when said micromirror is in said second state.

5. The flat-panel direct-view display of claim 1, wherein said flat-panel source is patterned and aligned to direct said electron beams onto said hinges.

6. The flat-panel direct-view display of claim 5, wherein said flat-panel source is on said substrate underneath said hinges.

7. The flat-panel direct-view display of claim 5, wherein said hinge exhibits a secondary emission coefficient less than unity at the landing energy of said electron beams, further comprising a secondary emission material (SEM) pad on each said hinge that exhibits a secondary emission coefficient greater than unit at the same landing energy.

8. The flat-panel direct-view display of claim 1, wherein said flat-panel source comprises a field emitter array (FEA).

9. The flat-panel direct-view display of claim 1, wherein said substrate has a translucent whitish surface, further comprising a backlight that transmits light through said substrate to form said background.

10. A flat-panel direct-view display, comprising:

a whitish background;

an array of electrostatically-actuated cantilevered micromirrors on a substrate in front of said background, each said micromirror comprising opposing light absorbing and light reflecting surfaces and a hinge that deflects the micromirror over a range from a first state in which the mirror covers a portion of the background and absorbs incident light to a second state in which the mirror uncovers a substantial majority of said portion of the background and reflects incident light to the background;

a secondary emission material (SEM) pad on each said hinge;

a reference electrode that is held at reference potential and positioned to allow said micromirrors to deflect over said range without experiencing snap-over; and

a patterned flat-panel source that is aligned with the micromirror hinges and addresses the micromirrors a row at a time by selectively depositing charge on their hinges and SEM pads to modulate the potential difference between each said micromirror and said reference electrode thereby adjusting the deflection of said micromirrors over said range to produce a grey scale direct-view image.

11. The flat-panel direct-view display of claim 10, wherein said patterned flat-panel source is on said substrate underneath said hinges.

12. The flat-panel direct-view display of claim 11, wherein said substrate has a translucent whitish surface on which said micromirrors and said flat-panel source are supported, further comprising a backlight behind said substrate.

13. The flat-panel direct-view display of claim 10, wherein said patterned flat-panel source is on another transparent substrate opposite the substrate that supports the micromirrors.

14. The flat-panel direct-view display of claim 13, further comprising a secondary collector grid that collects secondary electrons ejected from the hinges and provides said reference electrode.

15. The flat-panel direct-view display of claim 10, wherein said patterned flat-panel source is on said substrate underneath said hinges, further comprising a secondary collector grid between said flat-panel source and said micromirrors that collects secondary electrons ejected from the hinges and provides said reference electrode so that said micromirrors are actuated from their second state to their first state.

16. A flat-panel direct-view display, comprising:

a vacuum cell having a faceplate;

a substrate having a translucent whitish surface in said vacuum cell;

a backlight in said cell that transmits light through said substrate;

an array of electrostatically-actuated cantilevered micromirrors on said substrate, each said micromirror having opposing light reflecting and light absorbing surfaces and a hinge that is elevated above said substrate to deflect the micromirror over a range from the hinge'"'"'s quiescent state in which the mirror covers a portion of the substrate and absorbs incident light to a fully actuated state in which the mirror uncovers a substantial majority of said portion and reflects incident light to the substrate;

a reference electrode on an interior surface of said faceplate that is held at a reference potential and spaced apart from said substrate at a distance that allows said micromirrors to deflect over said range without contacting the reference electrode; and

a flat-panel source on said substrate underneath the elevated hinges that addresses the micromirrors'"'"' a row at a time by depositing charge on their hinges to modulate the potential difference between each said micromirror and said reference electrode thereby adjusting the deflection of said micromirrors over said range to produce a grey scale direct-view image.

17. The flat-panel direct-view display of claim 16, wherein said micromirror deflects approximately 90 degrees between its quiescent and fully actuated states.

18. The flat-panel direct-view display of claim 16, wherein said flat-panel source is patterned to lie only underneath said hinges.

19. The flat-panel direct-view display of claim 16, wherein said hinge exhibits a secondary emission coefficient less than unity at the landing energy of said electron beams, further comprising a secondary emission material (SEM) pad on each said hinge that exhibits a secondary emission coefficient greater than unit at the same landing energy.

20. The flat-panel direct-view display of claim 16, wherein said flat-panel source comprises a field emitter array (FEA).

21. A flat-panel direct-view display, comprising:

a background;

a floating potential insulating membrane;

a transparent substrate juxtaposed with said membrane;

an array of electrostatically-actuated cantilevered micromirrors on said substrate opposite said membrane and in front of said background, each said micromirror having hinge that is capable of deflecting the micromirror over a range from the hinge'"'"'s quiescent state in which the mirror covers a portion of the background to a fully actuated state in which the mirror uncovers a substantial majority of said portion of the background; and

a flat-panel source that addresses said membrane with a plurality of electron beams a row at a time to deposit a charge pattern on the membrane while the array of micromirrors is held at a reference potential to modulate the potential differences between the membrane and each said micromirror thereby adjusting the deflection of said micromirrors toward the membrane over said range to produce a grey scale direct-view image.

22. The flat-panel direct-view display of claim 21, wherein said micromirror deflects approximately 90 degrees between its quiescent and fully actuated states.

23. The flat-panel direct-view display of claim 21, further comprising an insulating post array on said flat-panel source that supports said membrane.

24. The flat-panel direct-view display of claim 21, further comprising:

a first array of attractor pads on said membrane on which said charge pattern is deposited; and

a second array of attractor pads on the other side of said membrane that mirrors the charge pattern said otherside of the membrane to deflect said micromirrors.