Micromachined acceleration and coriolis sensor
First Claim
1. A micromachined sensor for measuring linear and angular motion, said sensor comprising:
- a generally planar substrate, wherein said substrate is generally aligned in a wafer plane defined by a first axis and a second axis, wherein said second axis is orthogonal to said first axis, wherein said substrate is generally perpendicular to a third axis which is orthogonal to said wafer plane, and wherein said substrate is formed to include;
a frame having an inner cavity;
a proof mass disposed in said inner cavity, said proof mass having a top surface and a bottom surface;
flexural support means for connecting said proof mass to said frame and suspending said proof mass within said cavity; and
a plurality of resonators, including at least two opposite resonators which are disposed on opposite sides of said proof mass;
excitation means for vibrating said proof mass at a dither frequency;
sensing means for sensing the vibration of said resonators; and
means for mounting said excitation means and said sensing means adjacent said proof mass;
wherein said proof mass is capable of vibrating outside said wafer plane;
whereby said proof mass is capable of applying linear acceleration and rotational Coriolis forces, or displacements caused thereby, to said resonators in response to linear and angular motion of said sensor.
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Accused Products
Abstract
A solid state silicon micromachined acceleration and Coriolis (MAC) sensor that measures linear and angular motion. The MAC sensor is a single device that performs the functions of a conventional accelerometer and a gyroscope simultaneously. The MAC sensor is unique in that it is a differential dual stage device using only one micromachined proof mass to measure both linear and angular motions. The single proof mass is connected to opposing electromechanical resonators in a monolithic microstructure made from single crystal silicon. This unique design offers improvements in measurement performance and reductions in fabrication complexity that are beyond the state the art of earlier micromachined inertial sensors.
100 Citations
39 Claims
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1. A micromachined sensor for measuring linear and angular motion, said sensor comprising:
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a generally planar substrate, wherein said substrate is generally aligned in a wafer plane defined by a first axis and a second axis, wherein said second axis is orthogonal to said first axis, wherein said substrate is generally perpendicular to a third axis which is orthogonal to said wafer plane, and wherein said substrate is formed to include; a frame having an inner cavity; a proof mass disposed in said inner cavity, said proof mass having a top surface and a bottom surface; flexural support means for connecting said proof mass to said frame and suspending said proof mass within said cavity; and a plurality of resonators, including at least two opposite resonators which are disposed on opposite sides of said proof mass; excitation means for vibrating said proof mass at a dither frequency; sensing means for sensing the vibration of said resonators; and means for mounting said excitation means and said sensing means adjacent said proof mass; wherein said proof mass is capable of vibrating outside said wafer plane; whereby said proof mass is capable of applying linear acceleration and rotational Coriolis forces, or displacements caused thereby, to said resonators in response to linear and angular motion of said sensor. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39)
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Specification