Pressure sensor and method for detecting pressure
First Claim
1. A pressure sensing apparatus that senses at least a presence, an absence, magnitude or location of pressure, comprising:
- a substrate;
a plurality of electrodes formed over the substrate; and
a conductive sensor membrane extending over and spaced from at least one of the plurality of electrodes;
wherein, when pressure is applied to the sensor membrane, the sensor membrane is deformed to electrically contact at least one of the plurality of electrodes from which it is spaced.
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Accused Products
Abstract
A pressure sensor is provided which can detect the presence, absence or magnitude of pressure. The pressure sensor includes a sensor membrane and a sensor device. The sensor membrane is flexible and may be constructed of a conductive material or may include a flexible film attached to a conductive film. The sensor device includes an electrode substrate having an electrode surface and a set of electrodes disposed on the electrode surface. As pressure is applied to the sensor membrane, the sensor membrane distends or deforms towards the electrode set positioned on the electrode surface. As sufficient pressure is applied, the sensor membrane will make both electrical and mechanical contact with at least two of the electrodes. Since the sensor membrane is conductive, the contacted electrodes will be in electrical connection with each other. As pressure is increased, additional electrodes will be contacted and placed in electrical contact with each other. As a result, the presence, absence or magnitude of pressure exerted on the sensor membrane may be determined. The pressure sensor may be utilized in a variety of environments to sense either fluid pressure or physical contact pressure.
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Citations
27 Claims
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1. A pressure sensing apparatus that senses at least a presence, an absence, magnitude or location of pressure, comprising:
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a substrate; a plurality of electrodes formed over the substrate; and a conductive sensor membrane extending over and spaced from at least one of the plurality of electrodes; wherein, when pressure is applied to the sensor membrane, the sensor membrane is deformed to electrically contact at least one of the plurality of electrodes from which it is spaced. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27)
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Specification