Prepressured force/pressure sensor and method for the fabrication thereof
First Claim
1. A pressure sensor element including:
- first and second non-conductive substrates positioned adjacent to each other;
at least one first conductor on said first substrate and at least one second conductor on said second substrate, a said first conductor and a said second conductor intersecting adjacent to each other at a sensor point, said substrates being joined with an air-tight seal around a periphery of at least one sensor point; and
a pressure sensitive material between said first and second conductors at each sensor point;
a reduced air, low pressure area being formed between said substrates within the sealed periphery resulting in a predetermined prepressure being applied to said substrates at said at least one sensor point.
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Accused Products
Abstract
A pressure sensitive element or array is provided which includes at least one first conductor on a first substrate and at least one second conductor on a second substrate, with a first conductor and a second conductor intersecting adjacent to each other at a sensor point and a pressure sensitive material being between the first and second conductors at each such sensor point. A mechanism is also provided which applies a predetermined prepressure to the substrates at least at selected ones of the sensor points. The prepressure for a preferred embodiment is provided by joining the substrates with an air-tight seal around a periphery of at least the pressure point to which prepressure is to be applied and by creating a reduced pressure area between the substrates within the sealed periphery. For preferred embodiments, the reduced pressure is a substantial vacuum, causing substantially atmospheric pressure to be applied to the sensor points.
132 Citations
13 Claims
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1. A pressure sensor element including:
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first and second non-conductive substrates positioned adjacent to each other; at least one first conductor on said first substrate and at least one second conductor on said second substrate, a said first conductor and a said second conductor intersecting adjacent to each other at a sensor point, said substrates being joined with an air-tight seal around a periphery of at least one sensor point; and a pressure sensitive material between said first and second conductors at each sensor point; a reduced air, low pressure area being formed between said substrates within the sealed periphery resulting in a predetermined prepressure being applied to said substrates at said at least one sensor point. - View Dependent Claims (2, 3, 4, 5, 6)
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7. A pressure sensor element including:
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first and second non-conductive substrates positioned adjacent to each other; at least one first conductor on said first substrate and at least one second conductor on said second substrate, a said first conductor and a said second conductor intersecting adjacent to each other at a sensor point; a pressure sensitive material between said first and second conductors at each sensor point; and a shrinkwrap around said sensor element to apply prepressure thereto.
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8. A method for fabricating a pressure sensor element including:
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a) providing a first substrate having at least one first conductor thereon, a second substrate with at least one second conductor thereon and a pressure sensitive material coated on at least one of said substrates over the at least one conductor thereon; b) assembling said substrates with at least one first conductor intersecting an adjacent second conductor at a sensor point, the pressure sensitive material being between conductors and in contact therewith at each sensor point; c) sealing a periphery around sensor points; and d) creating a reduced pressure in the area between said substrates within said periphery. - View Dependent Claims (9, 10, 11, 12, 13)
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Specification