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Metallic thin flim and method of manufacturing the same, and surface acoustic wave device using the metallic thin film and the method thereof

  • US 6,033,471 A
  • Filed: 01/21/1997
  • Issued: 03/07/2000
  • Est. Priority Date: 01/19/1996
  • Status: Expired due to Fees
First Claim
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1. A method of forming a thin film electrode for use in a surface acoustic wave device, said method comprising the steps of:

  • forming an amorphous layer of an electrode material on a surface of a piezoelectric substrate while irradiating said surface of the piezoelectric substrate with an ion beam; and

    forming at least one of a single crystal layer of said electrode material and an oriented layer of said electrode material on a surface of said amorphous layer while irradiating said surface of said amorphous layer with said ion beam.

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