Metallic thin flim and method of manufacturing the same, and surface acoustic wave device using the metallic thin film and the method thereof

• US 6,033,471 A
• Filed: 01/21/1997
• Issued: 03/07/2000
• Est. Priority Date: 01/19/1996
• Status: Expired due to Fees

• Current Assignee: Murata Manufacturing Co Limited
• Original Assignee: Murata Manufacturing Co Limited
• Inventors: Kobayashi, Masato, Sakurai, Atsushi, Yoshino, Yukio, Nakanishi, Hidefumi
• Primary Examiner(s): KUNEMUND, ROBERT M
• Application Number:
  US08/786,410
• Time in Patent Office: 1,141 Days
• Field of Search: 204/192.17, 117/108, 117/109, 117/938, 117/939
• US Class Current: 117/108
• CPC Class Codes: C30B 23/02 Epitaxial-layer growth
• CPC Class Codes: C30B 29/02 Elements

Abstract

By using a dual ion-beam sputtering apparatus, an aluminum thin-film is formed on a glass substrate made of an amorphous material. While radiating an ion beam for assisting the film formation from an ion source onto the glass substrate, the aluminum thin-film is formed by depositing the sputtering ions which are generated by radiating an ion beam onto an aluminum target.

Claims

1. A method of forming a thin film electrode for use in a surface acoustic wave device, said method comprising the steps of:

forming an amorphous layer of an electrode material on a surface of a piezoelectric substrate while irradiating said surface of the piezoelectric substrate with an ion beam; and

forming at least one of a single crystal layer of said electrode material and an oriented layer of said electrode material on a surface of said amorphous layer while irradiating said surface of said amorphous layer with said ion beam.

2. A method according to claim 1, wherein said ion beam is selected from the group consisting of argon, helium, neon, krypton, xenon ions, or a mixture thereof.

3. A method according to claim 1, wherein said electrode material is selected from the group consisting of aluminum, gold, silver, copper, platinum, titanium, chromium, nickel, tungsten, an alloy thereof or an alloy essentially consisting of at least one of said elements.

4. A method of forming surface acoustic wave device, said method comprising the steps of:

forming an amorphous layer of an electrode material on a surface of a piezoelectric substrate while irradiating said surface of said piezoelectric substrate with an ion beam; and

forming at least one of a single crystal layer of said electrode material and an oriented layer of said electrode material on a surface of said amorphous layer while irradiating the surface of said amorphous layer with said ion beam.

5. A method according to claim 4, wherein said ion beam is selected from the group consisting of argon, helium, neon, krypton, xenon ions, or a mixture thereof.

6. A method according to claim 4, wherein said electrode material is selected from the group consisting of aluminum, gold, silver, copper, platinum, titanium, chromium, nickel, tungsten, an alloy thereof or an alloy essentially consisting of at least one of said elements.

7. A method of forming a thin film electrode for use in a surface acoustic wave device, said method comprising the steps of:

ion-beam sputtering an amorphous layer of an electrode material on a surface of a piezoelectric substrate;

ion-beam sputtering at least one of a monocrystal layer and an oriented layer of said electrode material on a surface of said amorphous layer; and

radiating an ion beam towards said surface of said substrate during said ion-beam sputtering steps so as to assist in said formation said layers.

8. A method according to claim 7, wherein said radiating step is carried out during the entire duration of said ion-beam sputtering step.

9. A method according to claim 7, wherein said ion beam is selected from the group consisting of argon, helium, neon, krypton, xenon ions, or a mixture thereof.

10. A method according to claim 7, wherein said electrode material is selected from the group consisting of aluminum, gold, silver, copper, platinum, titanium, chromium, nickel, tungsten, an alloy thereof or an alloy essentially consisting of at least one of said elements.