Measuring device and method for making same

• US 6,033,916 A
• Filed: 01/17/1997
• Issued: 03/07/2000
• Est. Priority Date: 01/17/1996
• Status: Expired due to Fees

• Current Assignee: Micronas Gmbh (TDK Corporation)
• Original Assignee: Micronas Intermetall GmbH (TDK Corporation)
• Inventors: Cremer, Christoph, Sieben, Ulrich, Haberland, Hellmut, Wolf, Bernhard
• Primary Examiner(s): Chin, Christopher L.
• Application Number:
  US08/785,630
• Time in Patent Office: 1,145 Days
• Field of Search: 422/55, 422/57, 422/82.01, 422/82.05, 422/82.11, 427/2.13, 427/496, 427/551, 427/569, 427/576, 427/578, 427/579, 427/421, 156/625.1, 156/643.1, 435/4, 436/518, 436/524, 436/525
• US Class Current: 438/1
• CPC Class Codes: G01N 27/4145 specially adapted for biomolecules, e.g. gate electrode with immobilised receptors
• CPC Class Codes: H01L 2924/00 Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
• CPC Class Codes: H01L 2924/0002 Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
• CPC Class Codes: Y10S 436/805 Optical property

Abstract

A measuring device for measuring or examining physiological parameters on biocomponents includes an FET sensor 5 whose electrical protective layer 12 is roughened or has a structured coating 15. The structuring of the active sensor contact surface 12 is adapted to the outer contour and topography of the biocomponent in question, so that a better possibility is available for anchoring the biocomponents to the contact surface 24 forming the FET protective layer of the sensor 5.

Claims

1. A process for producing a measuring device for measuring or examining physiological parameters of biological components, comprising providing at least one sensor having a measuring structure with an active contact surface for receiving the biological components, and structuring the active contact surface of the sensor to correspond approximately to outer contours of biological components to be measured or examined, wherein the active contact surface has at least one of gaps and holes capable of anchoring the biological components.

2. The process according to claim 1, wherein the step of structuring the active contact surface comprises depositing onto the surface by bombardment or sputtering material particles for cluster formation to form a cluster coating, and subsequently oxidizing and tempering the cluster coating.

3. The process according to claim 2, wherein the material particles comprise aluminum oxide.

4. The process according to claim 2, wherein the material particles comprise about 5000 atoms each and are applied to the active contact surface with a kinetic energy of about 1 eV/atom.

5. The process according to claim 1, wherein a shape of the biological components is taken up by means of a replica technique and wherein the step of structuring comprises a complementary reverse structuring.

6. The process according to claim 5, wherein the replica technique is selected from the group consisting of plasma bombardment and etching.

7. The process according to claim 2, wherein the material particles comprise about 12,000 atoms and are applied to the surface with a kinetic energy of less than about 1 eV/atom to form a contact surface coating (15) with a comparatively loose structure.