Thermal infrared detecting device capable of detecting infrared rays without influence of operating temperature
First Claim
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1. A thermal infrared detecting device for detecting infrared rays having a specific wavelength, said thermal infrared detecting device comprising:
- a first pixel having a first upper portion and a first lower portion which is distant from said first upper portion, said first upper portion having a first thermo-resistive converter and an infrared absorber which has a first surface while said first lower portion having a first reflecting film which has a second surface facing said first upper portion, said first surface and said second surface being remoted from each other by a first distance equal to (λ
*(2m-1)/4*n1) through a first spacing left between the first upper portion and the first lower portion, where λ
is representative of said specific wavelength;
m, a natural number; and
n1, a practical refractive index between said infrared absorber and said first reflecting film, wherein said first pixel being sensitive to infrared rays and wherein a resistance of said thermo-resistive converter changes in response to a temperature change of said infrared absorber; and
a second pixel having a second upper portion which is located in parallel with said first upper portion and which has a second thermo-resistive converter having a second lower portion which is extended from said first lower portion and which is distant from said second upper portion, wherein said second upper portion and said second lower portion are remoted from each other by a second distance equal to λ
*m)/2*n2) through a second spacing left between the second upper portion and the second lower portion, where λ
is representative of said specific wavelength;
m, a natural number; and
n2, a practical refractive index between a top of said second upper portion and a top of said second lower portion, wherein said second pixel being insensitive to infrared rays.
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Abstract
In a thermal infrared detecting device for detecting infrared rays having a specific wavelength, a first pixel (501) has an infrared absorber (544) and a first reflecting film (533) which have a first surface and a second surface, respectively. The first surface and the second surface are remoted from each other by a first distance equal to {λ*(2m-1)/4*n1}, where λ is representative of the specific wavelength; m, a natural number; and n1, a practical refractive index between the infrared absorber and the first reflecting film. The infrared absorber is included in a first upper portion (503) together with a first thermo-resistive converter (542). The first reflecting film is formed on a first lower portion which is distant from the first upper portion. A second pixel (502) has a second upper portion (504) which is located in parallel with the first upper portion and which has a second thermo-resistive converter (542). The second pixel has a second lower portion which is extended from the first lower portion and which is distant from the second upper portion.
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Citations
16 Claims
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1. A thermal infrared detecting device for detecting infrared rays having a specific wavelength, said thermal infrared detecting device comprising:
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a first pixel having a first upper portion and a first lower portion which is distant from said first upper portion, said first upper portion having a first thermo-resistive converter and an infrared absorber which has a first surface while said first lower portion having a first reflecting film which has a second surface facing said first upper portion, said first surface and said second surface being remoted from each other by a first distance equal to (λ
*(2m-1)/4*n1) through a first spacing left between the first upper portion and the first lower portion, where λ
is representative of said specific wavelength;
m, a natural number; and
n1, a practical refractive index between said infrared absorber and said first reflecting film, wherein said first pixel being sensitive to infrared rays and wherein a resistance of said thermo-resistive converter changes in response to a temperature change of said infrared absorber; anda second pixel having a second upper portion which is located in parallel with said first upper portion and which has a second thermo-resistive converter having a second lower portion which is extended from said first lower portion and which is distant from said second upper portion, wherein said second upper portion and said second lower portion are remoted from each other by a second distance equal to λ
*m)/2*n2) through a second spacing left between the second upper portion and the second lower portion, where λ
is representative of said specific wavelength;
m, a natural number; and
n2, a practical refractive index between a top of said second upper portion and a top of said second lower portion, wherein said second pixel being insensitive to infrared rays. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. A thermal infrared detecting device for detecting infrared rays having a specific wavelength, said thermal infrared detecting device comprising:
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a first pixel having a first upper portion and a first lower portion which is distant from said first upper portion, said first upper portion having a first thermo-resistive converter and an infrared absorber which has a first surface while said first lower portion having a first reflecting film which has a second surface facing said first upper portion, said first surface and said second surface being remoted from each other by a first distance equal to (λ
*(2m-1)/4*n1) through a first spacing left between the first upper portion and the first lower portion, where λ
is representative of said specific wavelength;
m, a natural number; and
n1, a practical refractive index between said infrared absorber and said first reflecting film; anda second pixel having a second upper portion which is located in parallel with said first upper portion and which has a second thermo-resistive converter and having a second lower portion which is extended from said first lower portion and which is distant from said second upper portion, said second upper portion having a third surface, said second lower portion having a fourth surface, wherein said third surface and said fourth surface are remoted from each other by a second distance equal to (λ
*m)/2*n2) through a second spacing left between the second upper portion and the second lower portion, where λ
is representative of said specific wavelength;
m, a natural number; and
n2, a practical refractive index between a top of said second upper portion and a top of said second lower portion. - View Dependent Claims (10, 11, 12, 13, 14, 15, 16)
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Specification
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Current AssigneeNEC Corporation
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Original AssigneeNEC Corporation
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InventorsOda, Naoki
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Primary Examiner(s)Hannaher, Constantine
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Assistant Examiner(s)GAGLIARDI, ALBERT J
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Application NumberUS08/979,814Time in Patent Office832 DaysField of Search258/338.1, 258/338.3, 258/338.4, 258/339.01, 258/339.02, 258/339.04, 258/332US Class Current250/338.1CPC Class CodesG01J 5/20 using resistors, thermistor...
