Charged particle beam irradiation apparatus and method of irradiation with charged particle beam

• US 6,034,377 A
• Filed: 04/30/1998
• Issued: 03/07/2000
• Est. Priority Date: 11/12/1997
• Status: Expired due to Fees

• Current Assignee: Mitsubishi Denki Kabushiki Kaisha (Mitsubishi Electric Corporation)
• Original Assignee: Mitsubishi Denki Kabushiki Kaisha (Mitsubishi Electric Corporation)
• Inventors: Pu, Yuehu
• Primary Examiner(s): BERMAN, JACK I
• Application Number:
  US09/069,944
• Time in Patent Office: 677 Days
• Field of Search: 250/492.3, 250/398, 378/137, 378/65
• US Class Current: 250/492.3
• CPC Class Codes: A61N 2005/1087 Ions; Protons
• CPC Class Codes: A61N 2005/1095 Elements inserted into the radiation path within the system, e.g. filters or wedges
• CPC Class Codes: A61N 5/1043 Scanning the radiation beam, e.g. spot scanning or raster scanning
• CPC Class Codes: G21K 5/02 having no beam-forming means
• CPC Class Codes: G21K 5/10 with provision for relative movement of beam source and object to be irradiated

Abstract

A charged particle beam irradiation apparatus includes two electromagnets arranged in series along a direction of an incident axis of a charged particle beam, for deflecting the charged particle beam in opposite directions, an energy modulator including a cylindrical member having a length and a distribution of wall thickness in a circumferential direction, a first rotational drive for rotating the cylindrical member around a rotation axis, and a detector for detecting the angular position of the cylindrical member. The energy modulator is disposed at a downstream side of the scanning electromagnets so that the deflected charged particle beam passes through the rotation axis. The apparatus includes an energy degrader for limiting energy of the charged particle beam, and a second rotational drive for rotating the scanning electromagnets and the energy modulator together around the incident axis of the charged particle beam.

Claims

1. A charged particle beam irradiation apparatus comprising:

scanning magnetic field generating means comprising two electromagnets arranged in series along a direction of an incident axis of a charged particle beam and deflecting the charged particle beam in opposite directions,

energy modulating means comprising a cylindrical member having a length and a distribution of wall thickness in a circumferential direction, means for rotating the cylindrical member around a rotation axis, and detecting means for detecting angle of rotation of the cylindrical member, the energy modulating means being disposed at a downstream side of the scanning magnetic field generating means so that the charged particle beam passes through the rotation axis,

energy attenuating means for limiting energy of the charged particle beam, and

means for rotating the scanning magnetic field generating means and the energy modulating means together around the incident axis of the charged particle beam.

2. The charged particle beam irradiation apparatus according to claim 1, wherein the angle of deflection of the charged particle beam by an upstream side electromagnet of the two electromagnets is equal to an angle of deflection of a downstream side electromagnet of the two electromagnets.

3. The charged particle beam irradiation apparatus according to claim 1, wherein the angle of deflection of the charged particle beam deflected by a downstream side electromagnet of the two electromagnets is larger than an angle of deflection by an upstream side electromagnetic of the two electromagnets.

4. The charged particle beam irradiation apparatus according to claim 1, including a beam stopper cooperating with the detecting means for detecting an angle of rotation of the energy modulating means for ON/OFF control of the charged particle beam.

5. A method of irradiation with a charged particle beam with a charged particle beam irradiation apparatus comprising:

scanning magnetic field generating means comprising two electromagnets arranged in series along a direction of an incident axis of a charged particle beam and deflecting the charged particle beam in opposite directions,

energy modulating means comprising a cylindrical member having a length and a distribution of wall thickness in a circumferential direction, means for rotating the cylindrical member around a rotation axis, and detecting means for detecting angle of rotation of the cylindrical member, the energy modulating means being disposed at a downstream side of the scanning magnetic field generating means so that the charged particle beam passes through the rotation axis,

energy attenuating means for limiting energy of the charged particle beam, and

means for rotating the scanning magnetic field generating means and the energy modulating means together around the incident axis of the charged particle beam, the method comprising irradiating a three-dimensional irradiation area by;

approximating the three-dimensional irradiation area as a group of cylindrical columns arranged parallel to an incidence direction z of an incident charged particle beam wherein a coordinate Pi of the center of each cylindrical column in an XY direction is the beam irradiation position, a length Δ

zi of each cylindrical column is a scanning range in a beam propagating direction (a depth direction) at the beam irradiation position Pi, and the coordinate of the maximum depth of irradiation is zi;

loading as previously prepared parameters Pi, Δ

zi and zi, and i=1, 2, . . . N for the irradiation area from a set table;

determining an angle of rotation and a strength of a magnetic field of the scanning magnetic field generating means and an angle of rotation of the energy modulating means in response to each Pi;

determining the maximum energy of the charged particle beam with the energy attenuating means in response to the maximum depth of irradiation zi; and

determining an effective range of the angle of rotation based on data from the energy modulating means in response to the scanning range of depth Δ

zi (initial value i=1), and irradiating with the charged particle beam within the effective range.

6. The method of irradiating a charged particle beam according to claim 5, comprising measuring the number of charged particles in the irradiating charged particle beam and the position of the charged particle beam.

7. The method of irradiating a charged particle beam according to claim 5, comprising continuing irradiation with the charged particle beam until the number of the charged particles reaches a predetermined value.