Variable capacitor using resistor generated heat to control dielectric thickness

• US 6,034,414 A
• Filed: 11/18/1997
• Issued: 03/07/2000
• Est. Priority Date: 11/18/1997
• Status: Expired due to Fees

• Current Assignee: Industrial Technology Research Institute
• Original Assignee: Industrial Technology Research Institute
• Inventors: Lin, Yung-Hsi
• Primary Examiner(s): Fahmy, Wael
• Assistant Examiner(s): Berezny, Neal
• Application Number:
  US08/972,810
• Time in Patent Office: 840 Days
• Field of Search: 257/600, 257/595, 257/312, 438/379, 438/393
• US Class Current: 257/600
• CPC Class Codes: H01G 5/16 using variation of distance between electrodes
• CPC Class Codes: H01L 28/40 Capacitors

Abstract

The invention discloses a variable capacitor including a first storage electrode, a second storage electrode, and a variable length means coupled therebetween. The capacitance can be adjusted by varying a dielectric space therebetween according with an electrical input. The method for manufacturing a variable capacitor in an integrated circuit includes the steps of forming a first storage electrode, a first dielectric layer, a second dielectric layer, a pair of contact channels, and a second sacrificial layer. The method further includes forming a third sacrificial layer, a second storage electrode, a resistor pattern, a passivation layer, and etching the third, the second, and the first sacrificial layer for having a dielectric space between the first storage electrode and the second storage electrode.

Claims

1. A capacitor with a variable capacitance formed on a semiconductor substrate, said capacitor comprising of:

a first storage electrode of conductive material;

a second storage electrode of conductive material; and

a variable length means coupled between said first storage electrode and said second storage electrode, for splitting said first storage electrode and said second storage electrode apart with a dielectric thickness, and varying said capacitance by varying said dielectric thickness through an electrical input by thermal buckling of said variable length means under said electrical input.

2. A capacitor of claim 1, wherein said variable length means is a pair of arms having a pair of thermal resistors within, said resistors being connected to said electrical input, and as said resistor being heated by said electric input for generating said thermal buckling of said pair of arms, said capacitance being varied by varying said dielectric thickness.

3. A capacitor of claim 1, wherein said capacitor further comprising of at least two layers of dielectric material placed between and adjacent to said first storage electrode and said second storage electrode plate.

4. A capacitor with a variable capacitance formed on a semiconductor substrate, said capacitor comprising of:

a first storage electrode of conductive material;

a second storage electrode of conductive material;

a variable length means coupled between said first storage electrode and said second storage electrode, for splitting said first storage electrode and said second storage electrode apart with a dielectric thickness, and varying said capacitance by varying said dielectric thickness through an electrical input; and

at least two layers of dielectric material placed between and adjacent to said first storage electrode and said second storage electrode plate.

5. A capacitor of claim 4, wherein said variable length means is a pair of arms having a pair of thermal resistors within, said resistors being connected to said electrical input, and as said resistor being heated by said electric input for generating thermal buckling of said pair of arms, said capacitance being varied by varying said dielectric thickness.

6. A capacitor of claim 5, wherein each said pair of thermal resistors in said arms comprises a circuit path selected from the group consisting of snake shape circuit path and circling circuit path.

7. A capacitor with a variable capacitance formed on a semiconductor substrate, said capacitor comprising of:

a first storage electrode of conductive material;

a second storage electrode of conductive material; and

a pair of arms having a pair of thermal resistors therewithin, said pair of arms coupled between said first storage electrode and said second storage electrode for splitting said first storage electrode and said second storage electrode apart with a dielectric thickness, said pair of resistors being connected to an electrical input, and as said resistors being heated by said electric input for generating thermal buckling of said arms, said capacitance being varied by varying said dielectric thickness.

8. A capacitor of claim 7, wherein said capacitor further comprising of at least two layers of dielectric material placed between and adjacent to said first storage electrode and said second storage electrode plate.

9. A capacitor of claim 7, wherein each said pair of thermal resistors in said arms comprises a circuit path selected from the group consisting of snake shape circuit path and circling circuit path.