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Variable capacitor using resistor generated heat to control dielectric thickness

  • US 6,034,414 A
  • Filed: 11/18/1997
  • Issued: 03/07/2000
  • Est. Priority Date: 11/18/1997
  • Status: Expired due to Fees
First Claim
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1. A capacitor with a variable capacitance formed on a semiconductor substrate, said capacitor comprising of:

  • a first storage electrode of conductive material;

    a second storage electrode of conductive material; and

    a variable length means coupled between said first storage electrode and said second storage electrode, for splitting said first storage electrode and said second storage electrode apart with a dielectric thickness, and varying said capacitance by varying said dielectric thickness through an electrical input by thermal buckling of said variable length means under said electrical input.

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