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Field emission charge controlled mirror (FEA-CCM)

  • US 6,034,810 A
  • Filed: 10/15/1998
  • Issued: 03/07/2000
  • Est. Priority Date: 04/18/1997
  • Status: Expired due to Term
First Claim
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1. A light modulator, comprising:

  • a thin vacuum cell having a transparent faceplate;

    a charge controlled mirror (CCM) in said vacuum cell adjacent the interior surface of said faceplate, said CCM comprising an array of electrostatically-actuable micromirrors;

    a collector grid in said vacuum cell; and

    a field emitter array (FEA) in said vacuum cell that comprises an array of field emitter tips that emit primary electrons, said primary electrons accelerating through said collector grid and striking the backside of the CCM causing secondary electrons to be ejected and collected on the collector grid leaving a charge pattern on the backside of the CCM that produces electrostatic forces that deflect said micromirrors.

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