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Gas discharge laser with gas temperature control

  • US 6,034,978 A
  • Filed: 05/12/1999
  • Issued: 03/07/2000
  • Est. Priority Date: 05/12/1999
  • Status: Active Grant
First Claim
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1. A gas discharge laser system with fast response temperature control for controlling gas temperature within desired limits during burst mode operation in which:

  • 1) heat is added to the laser gas by electric discharge in bursts of pulses with a pulse rate of about 2000 Hz or greater and heat rates in excess of 4 kw/sec for short time periods such as about 1/3 second followed by a short time idle period such as about 1/3 second during which no heat is added to the laser gas by electric discharge, and2) following a large number of such bursts, such as about 85 bursts, there follows a longer idle period such as about 9 seconds during which time no heat is added to the laser gas by electric discharge;

    said laser comprising,A. a laser chamberB. at least two elongated electrodes disposed in said laser chamber;

    C. a high voltage pulse power source for producing electric discharges between said elongated electrodes;

    D. a laser gas contained in said laser chamber;

    E. a fan for circulating said laser gas between said two elongated electrodes;

    said electric discharges and said fan adding heat to said laser gas over several minutes of such burst mode operation at a heat addition rate defining an average heat addition rate,F. a laser gas temperature control system for maintaining laser gas temperatures within desired limits when operating in a burst mode, said temperature control system comprising;

    1) a heat exchanger for removing heat from said laser gas said heat exchanger having a heat removal capacity exceeding said average heat addition rate,2) a fast acting temperature control means providing temperature responses at time periods of less than a fraction of one second,wherein said fast response temperature control is capable of controlling laser gas temperature to within a desired temperature range of less than 8°

    C. during such burst mode operation.

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