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High temperature multi-layered alloy heater assembly and related methods

  • US 6,035,101 A
  • Filed: 03/26/1998
  • Issued: 03/07/2000
  • Est. Priority Date: 02/12/1997
  • Status: Expired due to Term
First Claim
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1. A substrate processing apparatus comprising:

  • a chamber;

    a heater power system; and

    a heater assembly having, an inner core of a first metal, an outer shell of a second metal surrounding said inner core and including a surface for supporting a substrate, and a resistive heating element symmetrically disposed between an upper surface and a lower surface of said outer shell, said first metal having a higher thermal conductivity than said second metal.

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