Stage apparatus and linear motor, and exposure apparatus and device production method using the stage apparatus

• US 6,037,680 A
• Filed: 07/23/1998
• Issued: 03/14/2000
• Est. Priority Date: 10/09/1995
• Status: Expired due to Fees

• Current Assignee: Canon Kabushiki Kaisha (Canon Inc.)
• Original Assignee: Canon Kabushiki Kaisha (Canon Inc.)
• Inventors: Ebinuma, Ryuichi, Korenaga, Nobushige
• Primary Examiner(s): LABALLE, CLAYTON E
• Application Number:
  US09/121,112
• Time in Patent Office: 600 Days
• Field of Search: 310/12, 310/13, 310/15, 318/135
• US Class Current: 310/12.22
• CPC Class Codes: G03F 7/70358 Scanning exposure, i.e. relative movement of patterned beam and workpiece during imaging
• CPC Class Codes: G03F 7/70725 control
• CPC Class Codes: G03F 7/70758 Drive means, e.g. actuators, motors for long- or short-stroke modules or fine or coarse driving
• CPC Class Codes: H01J 2237/20221 Translation
• CPC Class Codes: H01J 2237/20278 Motorised movement
• CPC Class Codes: H01J 2237/3175 Lithography
• CPC Class Codes: H01L 21/682 Mask-wafer alignment in general G03F7/70, G03F9/70
• CPC Class Codes: H02K 41/031 of the permanent magnet type
• CPC Class Codes: H02K 41/0356 moving along a straight path

Abstract

A linear motor includes a single-phase coil, a plurality of polyphase coils each of which is shorter than the single-phase coil and wound to be parallel to the single-phase coil, a first permanent magnet movable relative to the single-phase coil and the plurality of polyphase coils in an axial direction of the single-phase coil, a first yoke consisting of a ferromagnetic substance and extending through the single-phase coil in the axial direction, a second yoke consisting of a ferromagnetic substance and having, outside the single-phase coil, a portion arranged to be parallel to the first yoke, to form a closed magnetic circuit together with the first yoke and the first permanent magnet such that the closed magnetic circuit circulates magnetic fluxes from the first permanent magnet across a winding of the single-phase coil, and a second permanent magnet for connecting the first and second yokes.

Claims

1. A linear motor comprising:

a single-phase coil;

a plurality of polyphase coils each of which is shorter than said single-phase coil and wound to be parallel to said single-phase coil;

a first permanent magnet movable relative to said single-phase coil and said plurality of polyphase coils in an axial direction of said single-phase coil;

a first yoke consisting of a ferromagnetic substance and extending through said single-phase coil in the axial direction;

a second yoke consisting of a ferromagnetic substance and having, outside said single-phase coil, a portion arranged to be parallel to said first yoke, to form a closed magnetic circuit together with said first yoke and said first permanent magnet such that said closed magnetic circuit circulates magnetic fluxes from said first permanent magnet across a winding of said single-phase coil; and

a second permanent magnet for connecting said first and second yokes.

2. A motor according to claim 1, wherein said single-phase coil is movable, said first and second yokes are fixed yokes each having a straight portion over an entire stroke of said single-phase coil, said first permanent magnet is a magnet fixed to said straight portion of one of said first and second yokes and opposing, with its one pole, said single-phase coil over the entire stroke of said single-phase coil, and said second magnet connects said first and second yokes outside the stroke.

3. A motor according to claim 1, wherein said first permanent magnet is a movable magnet with its one pole opposing said single-phase coil, said first and second yokes are fixed yokes each having a straight portion over an entire stroke of said movable magnet, said single-phase coil is wound on said first yoke over the entire stroke of said movable magnet, and said second magnet connects said first and second yokes outside the stroke.

4. A motor according to claim 3, wherein said single-phase coil is used for speed control, and said plurality of polyphase coils is used for acceleration and deceleration.

5. A stage apparatus using a linear motor of claim 1.

6. A linear motor comprising:

a single-phase coil;

a plurality of polyphase coils each of which is shorter than said single-phase coil and wound to be parallel to said single-phase coil;

a first permanent magnet movable relative to said single-phase coil and said plurality of polyphase coils in an axial direction of said single-phase coil;

a first yoke consisting of a ferromagnetic substance and extending through said single-phase coil in the axial direction; and

a second yoke consisting of a ferromagnetic substance and having, outside said single-phase coil, a portion arranged to be parallel to said first yoke, to form a closed magnetic circuit together with said first yoke and said first permanent magnet such that said closed magnetic circuit circulates magnetic fluxes from said first permanent magnet across a winding of said single-phase coil,

wherein said first and second yokes are connected such that the magnetic fluxes generated by the coil current lose the circulation path in the ferromagnetic substance.

7. A linear motor comprising:

a single-phase coil used for speed control;

a plurality of polyphase accelerating/decelerating coils each of which is shorter than said single-phase coil and wound to be parallel to said single-phase coil for speed control;

a first permanent magnet having magnetic poles movable relative to said single-phase coil in an axial direction of said single-phase coil;

a first yoke consisting of a ferromagnetic substance and extending through said single-phase coil in the axial direction;

a second yoke consisting of a ferromagnetic substance and having, outside said single-phase coil, a portion arranged to be parallel to said first yoke, to form a closed magnetic circuit together with said first yoke and said first permanent magnet such that said closed magnetic circuit circulates magnetic fluxes from said first permanent magnet across a winding of said single-phase coil; and

a second permanent magnet for connecting said first and second yokes, wherein said first permanent magnet is a movable magnet with one of its magnetic poles opposing said single-phase coil, said first and second yokes are fixed yokes each having a straight portion over an entire stroke of said movable magnet, said single-phase coil is wound on said first yoke over the entire stroke of said movable magnet, and said second permanent magnet connects said first and second yokes outside the stroke.

8. A linear motor comprising:

a single-phase coil used for speed control;

a plurality of polyphase accelerating/decelerating coils each of which is shorter than said single-phase coil and wound to be parallel to said single-phase coil for speed control;

a first permanent magnet having magnetic poles movable relative to said single-phase coil in an axial direction of said single-phase coil;

a first yoke consisting of a ferromagnetic substance and extending through said single-phase coil in the axial direction;

a second yoke consisting of a ferromagnetic substance and having, outside said single-phase coil, a portion arranged to be parallel to said first yoke, to form a closed magnetic circuit together with said first yoke and said first permanent magnet such that said closed magnetic circuit circulates magnetic fluxes from said first permanent magnet across a winding of said single-phase coil; and

a second permanent magnet for connecting said first and second yokes, wherein said single-phase coil is movable, said first and second yokes are fixed yokes each having a straight portion over an entire stroke of said single-phase coil, said first permanent magnet is a magnet fixed to the straight portion of one of said first and second yokes and opposing, with one of its magnetic poles, said single-phase coil over the entire stroke of said single-phase coil, and said second permanent magnet connects said first and second yokes outside the stroke.