Cold-cathode ion source with a controlled position of ion beam

• US 6,037,717 A
• Filed: 01/04/1999
• Issued: 03/14/2000
• Est. Priority Date: 01/04/1999
• Status: Expired due to Fees

• Current Assignee: Advanced Ion Beam Technology Incorporated
• Original Assignee: Advanced Ion Beam Technology Incorporated
• Inventors: Shkolnik, Alexander, Velikov, Leonid, Ritter, James, Maishev, Yuri
• Primary Examiner(s): Bettendorf, Justin P.
• Application Number:
  US09/225,159
• Time in Patent Office: 435 Days
• Field of Search: 315/111.21, 315/111.41, 315/111.81, 315/111.91, 204/298.02, 204/298.16, 250/423 R, 250/426, 250/423 F
• US Class Current: 315/111.91
• CPC Class Codes: H01J 2237/08 Ion sources
• CPC Class Codes: H01J 27/143 Hall-effect ion sources with closed electron drift

Abstract

A cold-cathode ion source with a closed-loop ion-emitting slit which is provided with means for generating a cyclically-variable, e.g., alternating or pulsating electric or magnetic field in an anode-cathode space. These means may be made in the form of an alternating-voltage generator which generates alternating voltage on one of the cathode parts that form the ion-emitting slit, whereas the other slit-forming part is grounded. The alternating voltage deviates the ion beam in the slit with the same frequency of the alternating voltage. In accordance with another embodiment, the aforementioned means may be an electromagnetic coil which generates a magnetic field which passes through the ion-emitting slit, thus acting on the condition of the spatial-charge formation and, hence, on concentration of ions in the ion beam. The cold-cathode ion source may be of any type, i.e., with the ion beam emitted in the direction perpendicular to the direction of drift of electrons in the ion-emitting slit or with the direction of emission of the beam which coincides with the direction of electron drift.

Claims

1. A method for controlling position of an ion beam on the surface of an object to be treated with said ion beam, comprising:

providing a cold-cathode ion source with crossed electrical and magnetic fields and with at least one ion-emitting slit, said ion source having a voltage source,

an anode connected to a positive potential of said voltage source; and

a

cathode which comprises at least two parts which are electrically isolated from each other and form said ion-emitting slit;

at least one of said two parts being connected to said voltage source;

activating said ion source and generating an ion beam which is emitted through said at least one ion-emitting slit toward said object, said ion beam being charged positively with respect to said at least one part of said cathode which is connected to said voltage source;

applying a potential to said at least one part of said cathode from said voltage source for generating an electric field across said at least one ion-emitting slit;

acting by said electric field onto said ion beam; and

deviating said ion beam in a direction transverse to said direction of said ion beam.

2. The method of claim 1, wherein said voltage source is an alternating voltage source having a voltage pulse with a positive half-wave and a negative halve wave, said electric field being generated only during said positive half-wave of said voltage pulse.

3. A method of claim 1, wherein said voltage source comprises:

a main voltage source having a main positive terminal and a main negative terminal, said main positive terminal of said first voltage source being connected to said anode;

an additional voltage source having an additional positive terminal and an additional negative terminal;

said at least two parts of said cathode being electrically isolated from one another, at least one of said two parts being connected to said additional power source;

said ion beam being charged positively by said main voltage source with respect to said at least one part of said cathode which is connected to said additional voltage source;

said additional voltage source generating an additional electric field across said at least one ion-emitting slit;

said step of acting onto said ion beam being performed by said additional electric field.

4. The method of claim 3, wherein said additional voltage source is a direct current voltage source having a negative terminal and a positive terminal and wherein said at least one part of said cathode is connected to said positive terminal, while another of said at least two parts of said cathode is grounded, said step of deviating said ion beam comprising alternating said connection of said at least one part of said cathode between ground and said positive terminal.

5. The method of claim 4, wherein said additional voltage source is a direct current voltage source having a negative terminal and a positive terminal and wherein said at least one part of said cathode is connected to said positive terminal, while another of said at least two parts of said cathode is grounded, said step of deviating said ion beam comprising varying the magnitude of a direct current voltage applied from said direct current voltage source to said at least one part of said cathode.

6. The method of claim 4, wherein said at least one part of said cathode surrounds said another part of said at least two parts with the formation of at least one outer part of said cathode, at least one inner part of said cathode, and said at least one ion-emitting slit between said at least one outer part and said at least one inner part of said cathode.

7. The method of claim 6, wherein said at least one outer part is connected to said positive terminal of said additional ion source, while said inner part is grounded.

8. The method of claim 6, wherein said at least one outer part of said cathode has at least one opening said at least one inner part having at least one projection inserted into said at least one opening with the formation of said at least one ion-emitting slit between said at least one opening and said at least one projection.

9. The method of claim 8, wherein said cold-cathode ion source has a plurality of said openings, said projections, and said ion-emitting slits.

10. The method of claim 3, wherein said additional voltage source is a variable-voltage generator and wherein said step of alternating said connection of said at least one part of said cathode between said negative and positive terminals is performed by means of said alternating current voltage generator.

11. The method of claim 10, wherein said additional electric field is a cyclically variable field which is generated by said variable-voltage generator.

12. The method of claim 11, further comprising the steps of:

placing at least one target of a sputterable material on the path of said ion beam towards said object at an angle to said beam for sputtering said sputterable material of said at least one target onto said object; and

performing said step of deviating said ion beam by means of said cyclically variable field.

13. The method of claim 12, wherein a plurality of targets of different sputterable materials are used, and wherein in said step of deviating said ion beam scans said plurality of targets with controlled residence time on said different sputterable materials.

14. An ion beam source with a closed-loop ion-emitting slit capable of emitting an ion beam toward an object located in a position reachable by said ion beam, comprising:

a hollow housing that functions as a cathode of said ion beam source;

anode located in said hollow housing and spaced from said cathode to form an ion acceleration and ionization space therebetween for ionization and acceleration of ions formed in said space during operation of said ion beam source;

magnetic field generating means in a magnetoconductive relationship with said anode and said cathode for forming a closed magnetoconductive circuit passing through said anode, said ionization gap, said cathode, and said magnetic field generating means;

said cathode having, on the side hollow housing facing said object, a first part and a second which are spaced from each other to form said closed-loop ion-emitting slit therebetween, said closed-loop ion-emitting slit being in the path of said magnetoconductive circuit;

electric power supply means for applying a positive charge to said anode;

means for generating a cyclically variable field acting on said ion beam on the path of emission of said beam from said ion source and capable of deviating said beam in the direction transverse to the direction of propagation of said beam with a frequency of said variable field; and

means for the supply of a working medium into said hollow housing of said cathode to form an ion beam when said working medium passes through said acceleration and ionization gap.

15. The ion source of claim 14, wherein said means for generating a cyclically variable field comprises an alternating voltage generator one end of which is grounded and is electrically connected to said hollow housing of said cathode and another end is electrically connected to one of said first and second parts of said cathode, said cyclically variable field being an electric field.

16. The ion source of claim 14, wherein said means for generating cyclically variable field comprises an alternating voltage generator, said first part of said cathode surrounding said second part and being grounded, said second part being connected to one side of said alternating voltage generator, whereas the other side of said alternating voltage generator being grounded;

said electric power supply means being a direct current electric power source which has a positive side and a negative side, said positive side being connected to said anode, said cyclically variable field being an electric field.

17. The ion source of claim 14, wherein said means for generating cyclically variable field comprises an alternating voltage generator, said first part of said cathode surrounding said second part and being connected to one side of said alternating voltage generator, said second part being grounded;

said electric power supply means being a direct current electric power source which has a positive side and a negative side, said positive side being connected to said anode, said cyclically variable field being an electric field.

18. The ion source of claim 14, wherein the direction of drift of electrons coincides with the direction of said ion beam, said means for generating a cyclically variable field is an alternating voltage generator one side of which is connected to one of said first and second parts of said cathode whereas the other side of said alternating voltage generator is grounded, said first and second parts of said cathode being electrically isolated from one another.

19. A cold-cathode ion source with crossed electrical and magnetic fields and with at least one ion-emitting slit, said ion source having a first voltage source, an anode connected to a positive potential of said first voltage source, an additional voltage source, and a cathode which comprises of at least two parts which are electrically isolated from one another, at least one of said two parts being connected to said additional voltage source.

20. The ion source of claim 19, wherein said additional voltage source is a direct current voltage source having a negative terminal and a positive terminal and wherein said at least one part of said cathode is connected to said positive terminals, while another of said at least two parts of said cathode is grounded, said additional voltage source having means for switching connections of said additional voltage source between ground and said at least one part of said cathode.

21. The ion source of claim 20, wherein said additional voltage source is a direct current voltage source having a negative terminal and a positive terminal and wherein said at least one part of said cathode is connected to said positive terminal, while another of said at least two parts of said cathode is grounded, said additional direct current voltage source having means for varying the magnitude of a direct current voltage applied from said direct current voltage source to said at least one part of said cathode.

22. The ion source of claim 19, wherein said at least one part of said cathode surrounds said another part of said at least two parts with the formation of at least one outer part of said cathode, at least one inner part of said cathode, and said at least one ion-emitting slit between said at least one outer part and said at least one inner part of said cathode.

23. The ion source of claim 22, wherein said at least one outer part is connected to said positive terminal of said additional ion source, while said inner part is grounded.

24. The ion source of claim 22 wherein said at least one outer part of said cathode has at least one opening, said at least one inner part having at least one projection inserted into said at least one opening with the formation of said at least one ion-emitting slit between said at least one opening and said at least one projection.

25. The ion source of claim 24, wherein said cold-cathode ion source has a plurality of said openings, said projections, and said ion-emitting slits.

26. The ion source of claim 20, wherein said additional voltage source is a variable-voltage generator.

27. The ion source of claim 19, further comprising at least one target of a sputterable material on the path of said ion beam towards said object at an angle to said beam for sputtering said sputterable material of said at least one target onto said object.

28. The ion source of claim 27, having a plurality of targets of different sputterable materials, said additional voltage source having means for adjusting the residence time of said ion beam on said different sputterable materials.