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Liquid crystal display and method of manufacturing the same

  • US 6,038,003 A
  • Filed: 06/09/1998
  • Issued: 03/14/2000
  • Est. Priority Date: 06/11/1997
  • Status: Expired due to Term
First Claim
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1. A method of manufacturing a liquid crystal display comprising the steps of:

  • forming a gate bus line, a gate electrode extending from the gate bus line, and a gate pad placed at an end portion of the gate bus line, with a first conductive material on a substrate;

    sequentially depositing a first insulating material, an intrinsic semiconductor material, a doped semiconductor material and a second conductive material on the gate bus line, the gate electrode and the gate pad;

    patterning the second conductive material to form a source bus line, a source electrode extending from the source bus line, a drain electrode, and a source pad at an end portion of the source bus line;

    forming a semiconductor layer, a gate insulating layer, and a gate pad protecting layer covering a first portion of the gate pad, by simultaneously patterning the intrinsic semiconductor material and the first insulating material, the gate pad protecting layer including a portion of the first insulating material and the semiconductor material; and

    forming a passivation layer by depositing a second insulating material over the substrate, the source bus line, the source electrode, the drain electrode, and the source pad, and patterning the passivation layer to expose a second portion of the gate pad and the gate pad protecting layer.

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