Interferometric modulation
First Claim
1. An interferometric modulator comprisinga first element comprising a reflector, anda second element including an induced absorber comprising a sandwich of an absorber between two matching layers,at least one of the matching layers comprising a combination of at least two of;
- a metal film, a dielectric film, and a semiconducting film, andthe reflector comprising at least one of a metal film, a dielectric film, and a semiconducting film.
6 Assignments
0 Petitions
Accused Products
Abstract
An interferometric modulator (Imod) cavity has a reflector and an induced absorber. A direct view reflective flat panel display may include an array of the modulators. Adjacent spacers of different thicknesses are fabricated on a substrate by a lift-off technique used to pattern the spacers which are deposited separately, each deposition providing a different thickness of spacer. Or a patterned photoresist may be used to allow for an etching process to selectively etch back the thickness of a spacer which was deposited in a single deposition. A full-color static graphical image may be formed of combined patterns of interferometric modulator cavities. Each cavity includes a reflector, and an induced absorber, the induced absorber including a spacer having a thickness that defines a color associated with the cavity.
-
Citations
26 Claims
-
1. An interferometric modulator comprising
a first element comprising a reflector, and a second element including an induced absorber comprising a sandwich of an absorber between two matching layers, at least one of the matching layers comprising a combination of at least two of; - a metal film, a dielectric film, and a semiconducting film, and
the reflector comprising at least one of a metal film, a dielectric film, and a semiconducting film. - View Dependent Claims (3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20)
- a metal film, a dielectric film, and a semiconducting film, and
-
2. An interferometric modulator comprising
a first element and a second element that cooperate to effect an optical response of the modulator to incident light received at the modulator via an incident medium, the first element having an outer surface exposed to the incident medium and an internal surface facing an internal surface of the second element, the first element being configured to absorb predetermined wavelengths present in light that is received at the modulator via the incident medium.
Specification