Process for fabricating article comprising refractory dielectric body

• US 6,041,623 A
• Filed: 08/27/1998
• Issued: 03/28/2000
• Est. Priority Date: 08/27/1998
• Status: Expired due to Term

• Current Assignee: RPX Corporation
• Original Assignee: Lucent Technologies, Inc. (Nokia Corporation)
• Inventors: Fleming, James William Jr.
• Primary Examiner(s): VINCENT, SEAN E
• Application Number:
  US09/141,440
• Time in Patent Office: 579 Days
• Field of Search: 65/17.2, 65/61, 65/104, 65/120, 65/391, 65/436, 219/121.36, 216/67
• US Class Current: 65/391
• CPC Class Codes: C03B 29/02 in a discontinuous way
• CPC Class Codes: C03B 37/01237 to modify the diameter by heat-polishing, e.g. fire-polishing
• CPC Class Codes: C03B 37/0148 Means for heating preforms during or immediately prior to deposition C03B37/0142, C03B37/01876 take precedence
• CPC Class Codes: C03B 37/016 by a liquid phase reaction process, e.g. through a gel phase
• CPC Class Codes: C03C 15/02 for making a smooth surface
• CPC Class Codes: C03C 23/006 by plasma or corona discharge

Abstract

The smoothness of refractory dielectric bodies, particularly silica sol-gel bodies, is substantially improved by a relatively straightforward treatment. In particular, the surface of the body is treated with a plasma fireball, such as induced by a plasma torch. The treatment is able to reduce the roughness, as measured by RA, in overcladding tubes formed by a sol-gel process by at least a factor of 2, typically at least a factor of 5. It is also possible to improve the smoothness of silica tubes that are drawn from a billet. Typically, the process reduces the roughness of silica bodies to an RA of about 1 microinch or less.

Claims

1. A method for fabricating an article comprising a refractory dielectric body, comprising the steps of:

providing the refractory dielectric body, wherein the refractory dielectric body is sold; and

treating a surface of the body with a plasma fireball such that the roughness of the surface is reduced, without substantial removal of the surface.

2. The method of claim 1, wherein the treatment reduces the roughness of the surface, as measured in RA, by at least a factor of 2.

3. The method of claim 1, wherein the RA subsequent to treatment is about 1 microinch or less.

4. The method of claim 3, wherein the RA subsequent to treatment is about 0.5 microinches or less.

5. The method of claim 2, wherein the body is a silica sol-gel body.

6. The method of claim 5, wherein the treatment reduces the roughness of the surface, as measured in RA, by at least a factor of 5.

7. The method of claim 1, wherein the body is treated with the plasma fireball in the absence of simultaneous deposition of material onto the body.

8. The method of claim 1, wherein less than 0.05 mm of the surface, over at least 90% of the body, is removed by the treatment step.

9. The method of claim 8, wherein no portion of the surface, over at least 90% of the body, is removed by the treatment step.

10. The method of claim 1, wherein the body comprises silica.

11. The method of claim 10, wherein the body is a core rod.

12. A method for fabricating an article comprising a refractory dielectric body, comprising the steps of:

providing the refractory dielectric body; and

treating a surface of the body with a plasma fireball such that the roughness of the surface is reduced without substantial removal of the surface, wherein the plasma fireball is generated by an isothermal plasma torch.

13. The method of claim 12, wherein the plasma torch has a power of about 10 to about 100 kW.

14. The method of claim 12, wherein the plasma-generating gas comprises at least one gas selected from oxygen, argon, nitrogen, and helium.

15. A method for fabricating an article comprising a refractory dielectric body, comprising the steps of:

providing the refractory dielectric body, wherein the body is hollow; and

treating an inner surface of the hollow body with a plasma fireball such that the roughness of the inner surface is reduced, without substantial removal of the inner surface,

wherein the plasma fireball is generated by an isothermal plasma torch.

16. The method of claim 15, wherein the body is a tube.

17. The method of claim 15, wherein the treatment reduces the roughness of the inner surface, as measured in RA, by at least a factor of 2.

18. The method of claim 15, wherein the RA subsequent to treatment is about 1 microinch or less.

19. The method of claim 18, wherein the RA subsequent to treatment is about 0.5 microinches or less.

20. The method of claim 15, wherein less than 0.05 mm of the inner surface, over at least 90% of the body, is removed by the treatment step.

21. The method of claim 20, wherein no portion of the inner surface, over at least 90% of the body, is removed by the treatment step.

22. A method for fabricating an article comprising a refractory dielectric body, comprising the steps of:

providing the refractory dielectric body, wherein the body is hollow; and

treating an inner surface of the hollow body with a plasma fireball such that the roughness of the inner surface is reduced, without substantial removal of the inner surface,

wherein the plasma fireball is generated by an isothermal plasma torch and wherein the hollow body constitutes a portion of the isothermal plasma torch.

23. The method of claim 22, wherein the hollow body is a tube.

24. The method of claim 22, wherein the treatment reduces the roughness of the inner surface, as measured in RA, by at least a factor of 2.

25. The method of claim 22, wherein the RA subsequent to treatment is about 1 microinch or less.

26. The method of claim 25, wherein the RA subsequent to treatment is about 0.5 microinches or less.

27. The method of claim 22, wherein less than 0.05 mm of the inner surface, over at least 90% of the body, is removed by the treatment step.

28. The method of claim 27, wherein no portion of the inner surface, over at least 90% of the body, is removed by the treatment step.