Multi-stage single-drive FOUP door system

• US 6,042,324 A
• Filed: 03/26/1999
• Issued: 03/28/2000
• Est. Priority Date: 03/26/1999
• Status: Expired due to Term

• Current Assignee: ASM America Incorporated (ASM International NV)
• Original Assignee: ASM America Incorporated (ASM International NV)
• Inventors: Aggarwal, Ravinder, Stevens, Ronald R.
• Primary Examiner(s): Kramer, Dean J.
• Assistant Examiner(s): O'Connor, Gerald J.
• Application Number:
  US09/277,662
• Time in Patent Office: 368 Days
• Field of Search: 414/811, 414/411, 414/416, 414/217, 414/935, 414/937, 414/938, 414/939, 414/940
• US Class Current: 414/411
• CPC Class Codes: H01L 21/67772 involving removal of lid, door, cover
• CPC Class Codes: Y10S 414/137 including means for charging or discharging wafer cassette
• CPC Class Codes: Y10S 414/139 including wafer charging or discharging means for vacuum chamber

Abstract

Two FOUPs are stacked and moved together towards an equipment wall by a horizontal actuator. FOUP doors are withdrawn as a unit by a horizontal actuator, and lowered as a unit by a vertical actuator to provide access to the interior of the FOUPs.

Claims

1. Apparatus for connecting front opening unified pods to substrate handling equipment, said apparatus comprising:

a lower pod support platform;

an upper pod support platform spaced above the lower platform a distance to permit the placement of a pod on the lower platform;

a lower pod door opener interface configured to interface with a front door of said the pod in the lower platform;

an upper door opener interface configured to interface with a front door of a pod on the upper platform, said upper and lower interfaces being interconnected so that movement of the lower interface will move the upper interface;

a horizontal actuator located below said lower platform for moving said pods and said door opening interfaces horizontally to remove front doors from said pods; and

a vertical actuator located below said lower platform for lowering both of said door opening interfaces at the same time together with said pod doors carried by said interfaces to permit access to substrates within the interior of said pods.

2. The apparatus of claim 1, including platform actuator for moving said platforms horizontally.

3. The apparatus of claim 2 including a support connecting said platform so that they are moved together as a unit by said platform actuator.

4. A method of connecting and opening front opening unified pods to equipment for moving substrates into and out of the pods, said method comprising the steps of:

positioning one of said pods on a lower platform mounted on said equipment;

positioning a second one of said pods on an upper platform spaced above said lower platform;

positioning a lower pod door opening interface in front of a front door of said lower pod and positioning an upper pod door opening interface in front of the front door of said upper pod, said door opening interfaces being connected to move as a unit;

producing relative horizontal movement between said door interfaces and said pods to cause the door interfaces to be connected to said doors;

producing relative movement between said pods and said door opening interfaces to simultaneously withdraw said doors from said upper and lower pods produced by an actuator positioned beneath said lower pod so that particles produced by the actuator are remote from the opened pods; and

lowering said door opening interfaces unit and said pod doors to a position wherein the interiors of said pods are accessible for the removal of substrates within said pods.

5. The method of claim 4, wherein said movement to withdraw said doors is produced by an actuator positioned beneath said lower pod so that particles produced by the actuator are remote from the opened pods, and wherein said moving step includes lowering said door opening unit, and the lowering step is performed by an actuator lower than said lower pod so as to minimize the risk of particle contamination of said substrates by said door lowering actuator.

6. The method of claim 4, including the step of moving said pods horizontally to cause the pod front doors to be aligned with openings in a vertical wall and to cause a frame around the doors to engage the wall surrounding the opening.

7. The method of claim 6, including returning the pods to said platforms by including the steps of raising said unit into alignment with said pods, moving the doors horizontally into engagement with the pods, and moving the pods with the doors away from the wall.