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Multi parameter scanner

  • US 6,043,506 A
  • Filed: 12/30/1997
  • Issued: 03/28/2000
  • Est. Priority Date: 08/13/1997
  • Status: Expired due to Term
First Claim
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1. A scanner system, comprising:

  • a sample illumination source, wherein said illumination source is comprised of a laser, wherein said laser simultaneously emits radiation of a first wavelength and a second wavelength;

    a scan head for scanning an area of a sample held within a sample support, wherein said scanning is along a first direction and a second direction, wherein said scan head directs said radiation from said source to a portion of said sample;

    a detection system for monitoring radiation emitted by said sample, wherein said detection system comprises a first detector monitoring radiation of a third wavelength and a second detector monitoring radiation of a fourth wavelength, wherein said first and second detectors simultaneously monitor radiation emitted by said sample, and wherein each detector outputs a signal corresponding to the intensity of said radiation; and

    a wavelength selection system coupled to said detection system, wherein said wavelength selection system determines said third and fourth wavelengths of radiation monitored by said first and second detectors.

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