Micromachined members coupled for relative rotation by torsion bars
First Claim
1. An integrated, micromachined structure comprising:
- a reference member;
a first pair of diametrically opposed, axially aligned torsion bars projecting from said reference member;
a first dynamic member that is coupled by said first pair of torsion bars to said reference member to be thereby supported from said reference member for rotation about a first axis that is collinear with said first pair of torsion bars;
said reference member, said first pair of torsion bars and said first dynamic member all monolithically fabricated from a stress-free semiconductor layer of a silicon substrate;
said first dynamic member thus supported within said reference member by said first pair of torsion bars, said first dynamic member;
having a center;
defining a first dynamic member rest plane if no external force is applied to said first dynamic member; and
exhibiting a plurality of vibrational modes including a principal torsional vibrational mode about the first axis that is collinear with said first pair of torsion bars, a vertical shaking vibrational mode, a vertical rocking vibrational mode, a lateral shaking vibrational mode, and a lateral rocking vibrational mode, each vibrational mode of said first dynamic member having a vibrational frequency, the vibrational frequency of the principal torsional vibrational mode being lower by at least 20% than the vibrational frequency of any other vibrational mode of said first dynamic member; and
first drive means for imparting rotary motion to said first dynamic member about the first axis that is collinear with said first pair of torsion bars.
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Accused Products
Abstract
Two torsion bars project from a reference member to support at least one plate or frame-shaped first dynamic member for rotation about an axis of the torsion bars. In one embodiment, a frame-shaped first dynamic member and a second pair of torsion bars, oriented non-parallel to the first torsion bars, support a second dynamic member for rotation about an axis that is collinear with the second pair of torsion bars. The vibrational frequency of the principal torsional vibrational mode of the dynamic members are respectively lower by at least 20% than the vibrational frequency of any other vibrational mode thereof. Either an electrostatic or electromagnetic drive means imparts rotary motion to the dynamic members about the collinear torsion bar axis(es). The reference member, the torsion bars and the dynamic member(s) are all monolithically fabricated from a stress-free semiconductor layer of a silicon substrate.
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Citations
30 Claims
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1. An integrated, micromachined structure comprising:
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a reference member; a first pair of diametrically opposed, axially aligned torsion bars projecting from said reference member; a first dynamic member that is coupled by said first pair of torsion bars to said reference member to be thereby supported from said reference member for rotation about a first axis that is collinear with said first pair of torsion bars;
said reference member, said first pair of torsion bars and said first dynamic member all monolithically fabricated from a stress-free semiconductor layer of a silicon substrate;
said first dynamic member thus supported within said reference member by said first pair of torsion bars, said first dynamic member;having a center; defining a first dynamic member rest plane if no external force is applied to said first dynamic member; and exhibiting a plurality of vibrational modes including a principal torsional vibrational mode about the first axis that is collinear with said first pair of torsion bars, a vertical shaking vibrational mode, a vertical rocking vibrational mode, a lateral shaking vibrational mode, and a lateral rocking vibrational mode, each vibrational mode of said first dynamic member having a vibrational frequency, the vibrational frequency of the principal torsional vibrational mode being lower by at least 20% than the vibrational frequency of any other vibrational mode of said first dynamic member; and first drive means for imparting rotary motion to said first dynamic member about the first axis that is collinear with said first pair of torsion bars. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30)
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Specification