Angular rate sensor
First Claim
Patent Images
1. An angular rate sensor comprising:
- a substrate;
a first movable body that is supported by the substrate so as to be movable in the x-direction and substantially unmovable in the y-direction;
a second movable body that is supported by the first movable body so as to be substantially unmovable in the x-direction and movable in the y-direction;
driving means for vibration-driving the first movable body in the x-direction;
displacement detecting means for detecting a y-directional displacement of the second movable body, and generating a displacement signal; and
converting means for converting the displacement signal into an angular rate signal,wherein the first movable body has a rectangular ring shape and the displacement detecting means is disposed in an inner space of the first movable body.
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Abstract
A first floating body is supported by a silicon substrate so as to be movable in the x-direction and substantially unmovable in the y-direction. A second floating body is supported by the first floating body so as to be substantially unmovable in the x-direction and movable in the y-direction. A driving circuit and a pair of fixed electrodes having comb finger electrodes vibration-drive the first movable body in the x-direction. Fixed comb finger electrodes and a capacitance detection circuit detect a y-directional displacement of the second movable body and generate a displacement signal. A signal processing circuit converts the displacement signal into an angular rate signal.
61 Citations
17 Claims
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1. An angular rate sensor comprising:
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a substrate; a first movable body that is supported by the substrate so as to be movable in the x-direction and substantially unmovable in the y-direction; a second movable body that is supported by the first movable body so as to be substantially unmovable in the x-direction and movable in the y-direction; driving means for vibration-driving the first movable body in the x-direction; displacement detecting means for detecting a y-directional displacement of the second movable body, and generating a displacement signal; and converting means for converting the displacement signal into an angular rate signal, wherein the first movable body has a rectangular ring shape and the displacement detecting means is disposed in an inner space of the first movable body. - View Dependent Claims (2, 3, 4, 5)
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6. An angular rate sensor comprising:
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a substrate; a first movable body that is supported by the substrate so as to be movable in the x-direction and substantially unmovable in the y-direction; a second movable body that is supported by the substrate so as to be movable in the y-direction and substantially unmovable in the x-direction; a third movable body that is movable both in the x and y-directions, connected to the first movable body so as to be movable in the y-direction and substantially unmovable in the x-direction with respect to the first movable body, and connected to the second movable body so as to be movable in the x-direction and substantially unmovable in the y-direction with respect to the second movable body; driving means for vibration-driving the first movable body in the x-direction; displacement detecting means for detecting a y-directional displacement of the second movable body, and generating a displacement signal; and converting means for converting the displacement signal into an angular rate signal. - View Dependent Claims (7, 8, 9, 10, 11, 12)
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13. An angular rate sensor comprising:
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a substrate; a first movable body that is supported by the substrate via first beams that are movable only in the x-direction so as to be movable in the x-direction and substantially unmovable in the y-direction; a second movable body that is supported by the substrate via second beams that are movable only in the y-direction so as to be movable in the y-direction and substantially unmovable in the x-direction; a third movable body that is movable in both the x and y-directions, connected to the first movable body via third beams that are movable only in the y-direction, and connected to fourth beams that branch off from the respective second beams and are movable only in the x-direction with respect to respective branching points; driving means for vibration-driving the first movable body in the x-direction; displacement detecting means for detecting a y-directional displacement of the second movable body, and generating a displacement signal; and converting means for converting the displacement signal into an angular rate signal. - View Dependent Claims (14, 15, 16, 17)
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Specification