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Angular rate sensor

  • US 6,044,707 A
  • Filed: 06/22/1998
  • Issued: 04/04/2000
  • Est. Priority Date: 06/20/1997
  • Status: Expired due to Fees
First Claim
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1. An angular rate sensor comprising:

  • a substrate;

    a first movable body that is supported by the substrate so as to be movable in the x-direction and substantially unmovable in the y-direction;

    a second movable body that is supported by the first movable body so as to be substantially unmovable in the x-direction and movable in the y-direction;

    driving means for vibration-driving the first movable body in the x-direction;

    displacement detecting means for detecting a y-directional displacement of the second movable body, and generating a displacement signal; and

    converting means for converting the displacement signal into an angular rate signal,wherein the first movable body has a rectangular ring shape and the displacement detecting means is disposed in an inner space of the first movable body.

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