Process for patterning conductive polyaniline films

• US 6,045,977 A
• Filed: 02/19/1998
• Issued: 04/04/2000
• Est. Priority Date: 02/19/1998
• Status: Expired due to Term

• Current Assignee: Bell Semiconductor, LLC (Hilco Inc. (d/b/a Hilco Global))
• Original Assignee: Lucent Technologies, Inc. (Nokia Corporation)
• Inventors: Partovi, Afshin, Chandross, Edwin Arthur, Venugopal, Ganesh, Houlihan, Francis Michael, Quan, Xina Shu-Wen
• Primary Examiner(s): McPherson, John A.
• Application Number:
  US09/026,227
• Time in Patent Office: 775 Days
• Field of Search: 430/311, 430/326, 430/329, 427/553, 427/595, 427/96, 427/257.1, 427/258.2, 427/337, 427/385.5
• US Class Current: 430/311
• CPC Class Codes: G03F 7/0045 with organic non-macromolecular light-sensitive compounds not otherwise provided for, e.g. dissolution inhibitors
• CPC Class Codes: G03F 7/093 characterised by antistatic means, e.g. for charge depletion
• CPC Class Codes: H01B 1/128 comprising six-membered aromatic rings in the main chain, e.g. polyanilines, polyphenylenes

Abstract

A method for making a device in which a conductive polyaniline layer (polyaniline salt layer) is formed on a substrate and patterned into a desired configuration, is disclosed. The polyaniline salt containing layer is formed by applying a polyaniline salt solution which combines a mixture of polyaniline and an additive, dissolved in a solvent on the substrate. Thereafter, the polyaniline salt containing layer is patterned by delineating in such layer at least one region having a conductivity less than about 10^-6 S/cm. The at least one region in the polyaniline salt containing layer having a conductivity less than about 10^-6 S/cm is optionally formed by combining a photobase generator (PBG) with the polyaniline salt solution. An adhesive is optionally mixed with the polyaniline salt solution for forming an polyaniline salt/adhesive polymer layer which is patterned into the desired configuration.

Claims

1. A method for fabricating a device, comprising the steps of:

applying a solution which combines a mixture of polyaniline and an additive, dissolved in a solvent on a substrate, wherein the polyaniline has the structure ##STR1## wherein 0≦

x≦

1, wherein R is selected from the group consisting of an alkyl, and alkyl sulfonate, and an aryl, and wherein the additive dissociates and forms a polyaniline salt;

evaporating the solvent to form a polyaniline salt containing layer on the substrate, wherein the polyaniline salt containing layer has a conductivity greater than about 10^-2 S/cm and wherein the polyaniline salt containing layer has a thickness less than about 10 microns; and

delineating at least one region in the polyaniline salt containing layer wherein the at least one region has a conductivity less than about 10^-6 S/cm.

2. The method of claim 1 wherein delineation of the at least one region in the polyaniline salt containing layer comprises the steps of:

forming a layer of energy sensitive resist material over the polyaniline salt containing layer;

introducing an image of a pattern into the energy sensitive resist material by exposing the energy sensitive resist material to patterned radiation;

developing the pattern with an aqueous basic solution, wherein the aqueous basic solution removes the irradiated energy sensitive resist material and wherein the aqueous basic solution that contacts uncovered areas of the underlying polyaniline salt containing layer forms the at least one region having the conductivity less than about 10^-6 S/cm; and

removing the unexposed energy sensitive resist material.

3. The method of claim 2 wherein the aqueous basic solution is selected from the group consisting of sodium hydroxide and tetramethylammonium hydroxide.

4. The method of claim 1 wherein the additive is selected from the group consisting of camphorsulfonic acid and alkylbenzenesulfonic acid.

5. The method of claim 1 wherein the solvent is selected from the group consisting of 2,2,2-trifluoroethanol and cyclohexanone.

6. The method of claim 1 wherein the additive is camphorsulfonic acid and the solvent is 2,2,2-trifluoroethanol.

7. The method of claim 1 wherein the mixture further comprises an energy sensitive compound that generates a basic moiety when exposed to radiation.

8. The method of claim 7 wherein delineation of the at least one region in the polyaniline salt containing layer comprises introducing an image of a pattern into the polyaniline salt containing layer by exposing the polyaniline salt containing layer to patterned radiation, wherein the basic moiety generated by the energy sensitive compound forms the at least one region in the polyaniline layer having the conductivity less than about 10^-6 S/cm.

9. The method of claim 1 wherein the mixture further comprises an adhesive polymer.

10. The method of claim 9 wherein the adhesive polymer is selected from the group consisting of thermoplastic adhesives, hot-melt adhesives and ultraviolet radiation curable adhesives.