Micromechanical device and method for its production

• US 6,046,067 A
• Filed: 04/01/1999
• Issued: 04/04/2000
• Est. Priority Date: 09/27/1993
• Status: Expired due to Term

• Current Assignee: Infineon Technologies AG
• Original Assignee: Siemens AG
• Inventors: Werner, Wolfgang
• Primary Examiner(s): DUTTON, BRIAN KEITH
• Application Number:
  US09/283,533
• Time in Patent Office: 369 Days
• Field of Search: 438/50, 438/52, 438/53, 73/514.21, 73/514.22, 73/514.23, 73/514.29, 73/514.32
• US Class Current: 438/52
• CPC Class Codes: B81B 2207/015 the micromechanical device and the control or processing electronics being integrated on the same substrate
• CPC Class Codes: B81C 1/00293 maintaining a controlled atmosphere with processes not provided for in B81C1/00285
• CPC Class Codes: B81C 1/00341 Processes for manufacturing microsystems not provided for in groups B81C1/00023 - B81C1/00261
• CPC Class Codes: B81C 2203/0136 Growing or depositing of a covering layer
• CPC Class Codes: G01P 1/023 for acceleration measuring devices
• CPC Class Codes: G01P 15/0802 Details
• CPC Class Codes: G01P 2015/0814 for translational movement of the mass, e.g. shuttle type

Abstract

A micromechanical device contains, on a carrier or substrate (1, 10), a micromechanical region which is covered on the chip by a planar covering (D) arranged on the carrier. A method for the production of a micromechanical device of this type provides that a body is formed in which a first insulating layer (2, 11) is arranged on a carrier (1, 10) and a silicon layer (3, 12) is arranged over the insulating layer. The silicon layer (3, 12) is structured, openings (L, LS) being formed down to the first insulating layers. An insulating layer region (IS, 13) and a planar further layer (P, 14) are applied. The further layer (P, 14) is structured, openings being formed down to the insulating layer region (IS, 13). The insulating layer region and the regions of the first insulating layer which are situated underneath it are selectively etched, and a covering layer is applied over the further layer as a planar covering (D). The device can be mounted in a plastic housing without a clean room atmosphere.

Claims

1. A method for producing a micromechanical device having a movable element, comprising the steps of:

forming a body having a carrier on which a first whole-area insulating layer is arranged and having a whole-area silicon layer arranged over said insulating layer;

structuring the silicon layer with openings formed down to the first insulating layer, which openings surround a movable element to be produced;

applying an insulating layer region, which extends over the openings and the movable element to be produced, and applying thereover a whole-area further layer;

structuring the further layer with windows down to the insulating layer region above the movable element to be produced;

selectively etching the insulating layer region and regions of the first insulating layer which are situated underneath region using the structured further layer as a mask, such that parts of the silicon layer are exposed and the movable element is completed; and

applying a covering layer over the further layer as a planar covering, thereby forming a closed cavity.

2. The method as claimed in claim 1, wherein a monocrystalline or a polycrystalline layer is provided as the silicon layer.

3. The method as claimed in claim 1, wherein the openings are filled with an insulating material following the structuring of the silicon layer, which insulating material is removed at least in subregions during the selective etching step.

4. The method as claimed in claim 1, wherein the insulating layer region is formed at least in a region which is provided for movable elements of the device.

5. The method as claimed in claim 1, wherein the insulating layer region is formed by local oxidation.

6. The method as claimed in claim 1, wherein the further layer is formed as a passivation layer.

7. The method as claimed in claim 1, wherein the further layer is formed as one of a nitride layer, silicon nitride layer, phosphorus glass layer, metal layer and an oxide layer.

8. The method as claimed in claim 1, wherein one of an oxide layer, a nitride layer and a phosphorus glass layer is applied as the insulating layer region.

9. The method as claimed in claim 1, wherein the method has the further step of forming supports for the covering in a movable part of the device, which supports are separated from a surrounding movable part.