Scanning near field optical microscope based on the use of polarized light

• US 6,046,448 A
• Filed: 05/21/1998
• Issued: 04/04/2000
• Est. Priority Date: 05/23/1997
• Status: Expired due to Term

• Current Assignee: Seiko Instruments Incorporated (Seiko Group)
• Original Assignee: Seiko Instruments Incorporated (Seiko Group)
• Inventors: Mitsuoka, Yasuyuki, Nakajima, Kunio, Sato, Katsuaki
• Primary Examiner(s): Allen, Stephone B.
• Application Number:
  US09/082,508
• Time in Patent Office: 684 Days
• Field of Search: 250/225, 250/234-236, 250/306, 250/309, 250/310, 250/311, 356/364, 356/369
• US Class Current: 250/234
• CPC Class Codes: G01N 21/21 Polarisation-affecting properties G01N21/19 takes precedence
• CPC Class Codes: G01Q 20/02 by optical means
• CPC Class Codes: G01Q 60/06 SNOM [Scanning Near-field Optical Microscopy] combined with AFM [Atomic Force Microscopy]
• CPC Class Codes: G01Q 60/22 Probes, their manufacture, or their related instrumentation, e.g. holders
• CPC Class Codes: Y10S 977/862 Near-field probe

Abstract

An optical fiber probe which has a minute opening on the top of a sharpened tip is allowed to get close to a sample, and the probe is moved by a piezo actuator along x- and y-axis directions so that a minute spot beam emanating from the minute opening can scan over the sample. For circular polarization modulation to be incorporated in the process, a beam, before it is incident on the optical fiber probe, is given an optical delay changing at a frequency of p (Hz) by means of a piezo-optical modulator. A minute spot beam emanating from the minute opening passes through the sample to be received after the passage through an analyzer by a light receiving element. The output from the light receiving element is fed to a lock-in amplifier, p- and 2p-components are separated through lock-in rectification, and they are rendered images by a controller.

Claims

1. A scanning near field optical microscope based on the use of polarized light wherein the interval between the tip of a probe and the surface of a sample or a medium to be measured is kept so small as to be within an action distance where an inter-atomic force or other interactive forces result between the tip and the surface, a beam is scanned over the surface through a means allowing a two-dimensional scanning, the beam is radiated onto a tiny area of the surface or the beam emanating from a tiny area of the surface is detected, and therewith the form of sample and two-dimensional optical information thereof are simultaneously obtained, comprising:

a light source;

a probe with a sharpened tip;

a means to maintain the interval between the tip and the surface within an action distance where an inter-atomic force or other interactive forces result between the tip and the surface;

a means to obtain a polarized beam carrying the optical information of a tiny area of sample or medium, by allowing a beam from the light source to interact with the surface at the tip;

a light receiving means to receive the polarized beam;

a modulating means which is placed on the light path between the light source and light receiving means and gives a periodically changing optical delay to the beam; and

a rectifying means to selectively separate, out of the output from the light receiving means, wave components having frequencies integer times as high as the modulation frequency worked by the modulating means.

2. A scanning near field optical microscope based on the use of polarized light as claimed in claim 1, the probe has a light transmitting body.

3. A scanning near field optical microscope based on the use of polarized light as claimed in claim 2, wherein the modulating means placed on the light path between the light source and light receiving means to give a periodically changing optical delay to a beam further comprising a means to impose a periodically changing stress to the light transmitting body.

4. A scanning near field optical microscope based on the use of polarized light as claimed in claim 1 wherein the means to maintain the interval between the tip and the surface within an action distance where an inter-atomic force or other interactive forces result between the tip and the surface, comprising:

a moving means to alter the distance between the tip and the surface;

a distance determining means to determine the distance between the tip and the surface; and

a control means to maintain constant the distance between the tip and the surface on the basis of a signal delivered by the distance determining means.

5. A scanning near field optical microscope based on the use of polarized light as claimed in claim 4, wherein the distance determining means comprising:

a vibrating means to vibrate the tip and the surface relative to each other in a horizontal or vertical direction; and

a displacement detecting means to detect the displacement of the tip.

6. A scanning near field optical microscope based on the use of polarized light wherein the interval between the tip of a probe and the surface of a sample or a medium to be measured is kept so small as to be within an action distance where an inter-atomic force or other interactive forces result between the tip and the surface, a beam is scanned over the surface through a means allowing a two-dimensional scanning, the beam is radiated onto a tiny area of the surface or the beam emanating from a tiny area of the surface is detected, and therewith the form of sample and two-dimensional optical information thereof are simultaneously obtained, comprising:

a light source;

a probe with a sharpened tip and a light transmitting body;

a means to maintain the interval between the tip and the surface within an action distance where an inter-atomic force or other interactive forces result between the tip and the surface;

a means to obtain a polarized beam carrying the optical information of a tiny area of sample or medium, by allowing a beam from the light source to interact with the surface at the tip; and

a light receiving means to receive the polarized beam, and wherein a material constituting the light transmitting body has a photo-elasticity coefficient of 1.0×

10^-6 [mm² ·

N-1] or less.

7. A scanning near field optical microscope based on the use of polarized light as claimed in claim 6, wherein the material constituting the light transmitting body is quartz glass containing lead oxide.

8. A scanning near field optical microscope based on the use of polarized light wherein the interval between the tip of a probe and the surface of a sample or a medium to be measured is kept so small as to be within an action distance where an inter-atomic force or other interactive forces result between the tip and the surface, a beam is scanned over the surface through a means allowing a two-dimensional scanning, the beam is radiated onto a tiny area of the surface or the beam emanating from a tiny area of the surface is detected, and therewith the form of sample and two-dimensional optical information thereof are simultaneously obtained, comprising:

a light source;

a probe with a sharpened tip and a light transmitting body;

a means to maintain the interval between the tip and the surface within an action distance where an inter-atomic force or other interactive forces result between the tip and the surface;

a means to obtain a polarized beam carrying the optical information of a tiny area of sample or medium, by allowing a beam from the light source to interact with the surface at the tip;

a light receiving means to receive the polarized beam; and

a means to confer an optical delay by causing a stress in the light transmitting body.