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Stabilizer for switch-mode powered RF plasma

DC
  • US 6,046,546 A
  • Filed: 05/05/1998
  • Issued: 04/04/2000
  • Est. Priority Date: 04/16/1992
  • Status: Expired due to Term
First Claim
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1. A method of stably delivering power to a plasma through an alternating signal comprising the steps of:

  • a. generating an alternating signal at a fundamental frequency by a switch-mode power supply;

    b. transmitting said alternating signal into the plasma;

    whilec. affirmatively absorbing energy at substantially other than the fundamental frequency by electrical circuitry.

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