Ferroelectric memory and screening method therefor
First Claim
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1. A ferroelectric memory comprising:
- a memory cell array in which a plurality of memory cells are arrayed in rows and columns, each of the plurality of memory cells including an information storage capacitor and a first MOS transistor, which is connected to the information storage capacitor in series, the information storage capacitor having a first and a second electrode opposing each other and a ferroelectric film sandwiched by the first and the second electrode, the first MOS transistor having first source and drain regions and a first gate electrode, and one of the first source and drain regions being connected to the first electrode of the capacitor;
a plurality of word lines arrayed in correspondence with the rows, each of the plurality of word lines being connected to the first gate electrode of the first MOS transistor of each of the plurality of memory cells arrayed on a corresponding one of the rows;
a row decoder for selectively driving the plurality of word lines;
a plurality of plate lines, each of the plate lines being connected to the second electrode of the capacitor of each of the plurality of memory cells arrayed on a corresponding one of the rows;
a plurality of bit lines arrayed in correspondence with the columns and arranged to cross the plurality of word lines, each of the plurality of bit lines being connected to the other of the first source and drain regions of the first MOS transistor of each of the plurality of memory cells arrayed on a corresponding one of the columns;
a plurality of second MOS transistors for bit line selection, which are coupled to the plurality of bit lines, respectively, each of the second MOS transistors having second source and drain regions and a second gate electrode, and one of the second source and drain regions being connected to a corresponding one of the plurality of bit lines; and
a test circuit connected to the second gate electrode of each of the plurality of second MOS transistors, the test circuit transferring data to the plurality of memory cells through the plurality of bit lines and the plurality of second MOS transistors.
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Abstract
A ferroelectric memory has a memory cell screening test circuit connected to bit lines through switching transistors. In screening, at least one word line is selected, and data is simultaneously written in all memory cells connected to this word line. Since data is not restored after the rewrite, all FRAM cells can be screened under the same condition. By this circuit, a memory cell having a write failure according to the imprint characteristics inherent to the ferroelectric memory is screened.
53 Citations
20 Claims
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1. A ferroelectric memory comprising:
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a memory cell array in which a plurality of memory cells are arrayed in rows and columns, each of the plurality of memory cells including an information storage capacitor and a first MOS transistor, which is connected to the information storage capacitor in series, the information storage capacitor having a first and a second electrode opposing each other and a ferroelectric film sandwiched by the first and the second electrode, the first MOS transistor having first source and drain regions and a first gate electrode, and one of the first source and drain regions being connected to the first electrode of the capacitor; a plurality of word lines arrayed in correspondence with the rows, each of the plurality of word lines being connected to the first gate electrode of the first MOS transistor of each of the plurality of memory cells arrayed on a corresponding one of the rows; a row decoder for selectively driving the plurality of word lines; a plurality of plate lines, each of the plate lines being connected to the second electrode of the capacitor of each of the plurality of memory cells arrayed on a corresponding one of the rows; a plurality of bit lines arrayed in correspondence with the columns and arranged to cross the plurality of word lines, each of the plurality of bit lines being connected to the other of the first source and drain regions of the first MOS transistor of each of the plurality of memory cells arrayed on a corresponding one of the columns; a plurality of second MOS transistors for bit line selection, which are coupled to the plurality of bit lines, respectively, each of the second MOS transistors having second source and drain regions and a second gate electrode, and one of the second source and drain regions being connected to a corresponding one of the plurality of bit lines; and a test circuit connected to the second gate electrode of each of the plurality of second MOS transistors, the test circuit transferring data to the plurality of memory cells through the plurality of bit lines and the plurality of second MOS transistors. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
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15. A ferroelectric memory comprising:
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a plurality of memory cells, each of the memory cells having a first transistor and a ferroelectric capacitor, the ferroelectric capacitor having a first electrode, a second electrode and a ferroelectric film interposed between the first and the second electrode, each of the first transistor having a first gate electrode and a first current path, one end of the first current path being connected to the first electrode of the ferroelectric capacitor; a plurality of bit lines, each connected to the other end of the first current path of the first transistor in a corresponding one of the plurality of memory cells; a plurality of word lines, each connected to the first gate electrode of the first transistor in a corresponding one of the plurality of memory cells; a plurality of second transistors, each having a second gate electrode and a second current path, one end of the second current path being connected to a corresponding one of the plurality of bit lines; a test circuit connected to the second gate electrode of each of the plurality of second transistors, the test circuit selecting the plurality of second transistors in a test mode; and a pad receiving data and transferring the data to a corresponding one of the plurality of memory cells through a corresponding one of the plurality of second transistors and a corresponding one of the plurality of bit lines.
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16. A ferroelectric memory comprising:
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a plurality of memory cells, each of the memory cells having a first transistor and a ferroelectric capacitor, the ferroelectric capacitor having a first electrode, a second electrode and a ferroelectric film interposed between the first and the second electrode, each of the first transistor having a first gate electrode and a first current path, one end of the first current path being connected to the first electrode of the ferroelectric capacitor; a plurality of bit lines, each connected to the other end of the first current path of the first transistor in a corresponding one of the plurality of memory cells; a plurality of word lines, each connected to the first gate electrode of the first transistor in a corresponding one of the plurality of memory cells; a plurality of second transistors, each having a second gate electrode and a second current path, one end of the second current path being connected to a corresponding one of the plurality of bit lines; a first pad supplied with a predetermined voltage; a test circuit connected to the second gate electrode of each of the plurality of second transistors, the test circuit having an inverter circuit formed of a p-channel type MOS transistor and an n-channel type MOS transistor, the p-channel MOS transistor having a source terminal and a drain terminal, the source terminal being supplied with the predetermined voltage applied to the first pad; and a second pad receiving data and transferring the data to a corresponding one of the plurality of memory cells through a corresponding one of the plurality of second transistors and a corresponding one of the plurality of bit lines. - View Dependent Claims (17, 18)
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19. A ferroelectric memory comprising:
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a plurality of memory cells, each of the memory cells having a first transistor and a ferroelectric capacitor, the ferroelectric capacitor having a first electrode, a second electrode and a ferroelectric film interposed between the first and the second electrode, each of the first transistor having a first gate electrode and a first current path, one end of the first current path being connected to the first electrode of the ferroelectric capacitor; a plurality of bit lines, each connected to the other end of the first current path of the first transistor in a corresponding one of the plurality of memory cells; a plurality of word lines, each connected to the first gate electrode of the first transistor in a corresponding one of the plurality of memory cells; a plurality of second transistors, each having a second gate electrode and a second current path, one end of the second current path being connected to a corresponding one of the plurality of bit lines; a first pad supplied with a predetermined voltage; a second pad supplied with a predetermined signal; a signal line connected to the second gate electrode of each of the plurality of second transistors; a test circuit having an inverter, the inverter having an input terminal, an output terminal and a power supply terminal, the power supply terminal being supplied with the predetermined voltage applied to the first pad, the output terminal of the inverter being connected to the signal line, the input terminal of the inverter circuit being supplied with the predetermined signal applied to the second pad; and a third pad receiving data and transferring the data to a corresponding one of the plurality of memory cells through a corresponding one of the plurality of second transistors and a corresponding one of the plurality of bit lines. - View Dependent Claims (20)
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Specification