Apparatus for and method of cleaning objects to be processed

• US 6,050,275 A
• Filed: 09/24/1997
• Issued: 04/18/2000
• Est. Priority Date: 09/27/1996
• Status: Expired due to Term

• Current Assignee: Tokyo Electron Limited
• Original Assignee: Tokyo Electron Limited
• Inventors: Nakashima, Satoshi, Kamikawa, Yuji, Ueno, Kinya
• Primary Examiner(s): Stinson, Frankie L.
• Application Number:
  US08/936,526
• Time in Patent Office: 937 Days
• Field of Search: 134/105, 134/107, 134/902, 134/200, 134/102.3
• US Class Current: 134/105
• CPC Class Codes: B08B 3/08 the liquid having chemical or dissolving effect substances used, see the relevant classes
• CPC Class Codes: H01L 21/67051 using mainly spraying means, e.g. nozzles
• CPC Class Codes: H01L 21/67057 with the semiconductor substrates being dipped in baths or vessels
• CPC Class Codes: Y10S 134/902 Semiconductor wafer

Abstract

A cleaning apparatus and a cleaning method for cleaning an object are provided. In the cleaning apparatus, a drying chamber 42 and a cleaning bath 41 are separated from each other up and down, respectively. Thus, a space in the drying chamber 42 can be insulated from a space of the cleaning bath 41 through rotary doors 59a and a slide door 72. In the cleaning method, a cleaning process in the cleaning bath 41 is carried out while sealing it by the rotary doors 59a. On the other hand, a drying process in the drying chamber 42 is accomplished while sealing and closing it by the slide door 72. Consequently, there is no possibility that, during the drying process, the object is subjected to a bad influence from a chemical treatment.

Claims

1. A cleaning apparatus for cleaning an object to be processed, said apparatus comprising:

a processing bath for storing processing liquid in which said object is immersed, said processing bath having an upper portion defining an upper opening;

a drying chamber for drying said object, said drying chamber being enclosed with a case arranged above said processing bath, said case having a lower portion defining a lower opening, said lower opening of said drying chamber being connected with said upper opening of said processing bath between said case of said drying chamber and said processing bath;

transporting means for transporting said object between said processing bath and said drying chamber through said openings;

means for filling said drying chamber with an atmosphere of organic solvent, said filling means being in said drying chamber; and

discharging means for discharging gas blown out from said filling means, said discharging means being arranged in a lower position than said filling means in said drying chamber and being arranged on two sides of said chamber.

2. A cleaning apparatus as claimed in claim 1, further including sealing means for sealing said drying chamber when said openings are closed.

3. A cleaning apparatus as claimed in claim 2, wherein said sealing means is forced onto said lower portion of said case in order to seal said drying chamber.

4. A cleaning apparatus as claimed in claim 1, wherein said filling means includes a nozzle extending in an arranging direction of said object, said nozzle having a plurality of outlets for ejecting gas into said drying chamber located along said nozzle at a same interval as that of said objects to be processed.

5. A cleaning apparatus as claimed in claim 1, further comprising an IPA supplier for supplying isopropyl alcohol, a heated nitrogen supplier for supplying heated nitrogen, and a mixer for mixing isopropyl alcohol with heated nitrogen and supplying a mixture of isopropyl alcohol and heated nitrogen.

6. A cleaning apparatus as claimed in claim 1, wherein said discharging means are arranged on both sides of said drying chamber.

7. A cleaning apparatus as claimed in claim 1, further comprising a nozzle arranged at a lower portion of said processing bath for ejecting processing liquid for said object to be processed, said nozzle extending in an arranging direction of said objects, said nozzle having a plurality of outlets for ejecting the processing liquid into said processing bath, said outlets being located along said nozzle at a same interval as that of said objects to be processed.

8. A cleaning apparatus as claimed in claim 1, further comprising open and shut means for opening and shutting said lower opening of said drying chamber, said lower opening being closed by said open and shut means when said objects are dried, said open and shut means being located under said lower opening of said case of said drying chamber and above said upper opening of said processing bath.

9. A cleaning apparatus as claimed in claim 1, wherein said case has an upper portion defining an upper aperture, and further includes a cover arranged on said upper aperture in order to open and close said upper aperture, said cover being controlled so that said cover is opened when said open and shut means is closed.

10. A cleaning apparatus as claimed in claim 1, wherein said transporting means includes:

a retaining member for retaining said object;

a supporting member for supporting said retaining member, said supporting member extending from outside of said case of said drying chamber into said inside of said processing bath, and having a lower portion provided with said retaining member, said supporting member being inserted into said processing bath through said openings when said retaining member is disposed in said processing bath;

moving means for moving said supporting member in order to move said object between said processing bath and said drying chamber, said moving means being provided on said upper portion of said supporting member, and

wherein said case of said drying chamber has a peripheral portion surrounding an aperture through which said supporting member extends from outside to inside of said case of said drying chamber, and sealing means is provided between said peripheral portion and said supporting member.

11. A cleaning apparatus as claimed in claim 10, wherein said sealing means is expanded when said supporting member is not moved and when it is required to seal said drying chamber, said sealing means is contracted when said supporting member is moved.

14. A cleaning apparatus as claimed in any one of claims 1, 12 or 13 wherein said processing liquid stored in said processing bath is a deaerated rinse.

15. A cleaning apparatus as claimed in any one of claims 1, 12 or 13 further comprising first blowing means, arranged between said processing bath and said drying chamber, for blowing inert gas against said object transported from said processing bath to said drying chamber.

16. A cleaning apparatus as claimed in claim 15, further comprising means for cooling said inert gas.

17. A cleaning apparatus as claimed in any one of claims 1, 12 or 13 further comprising:

decompressing means for decompressing said drying chamber; and

second blowing means for blowing said inert gas against said object in said drying chamber.

18. A cleaning apparatus as claimed in any one of claims 1, 12 or 13 further comprising heating means, arranged in said drying chamber, for heating an interior of said drying chamber.

19. A cleaning apparatus as claimed in any one of claims 1, 12 or 13 wherein said processing liquid stored in said processing bath is a cooled rinse.

12. A cleaning apparatus for cleaning an object to be processed, said apparatus comprising:

a processing bath for storing processing liquids in which said object is immersed, said processing bath having an upper portion defining an upper opening;

a drying chamber enclosed with a case arranged above said processing bath, said case having a lower portion defining a lower opening, said lower opening being connected with said upper opening between said case of said drying chamber and said processing bath;

a retaining member for retaining said object;

a supporting member for supporting said retaining member from said drying chamber'"'"'s side, said supporting member being inserted into said processing bath through said openings when said retaining member is disposed in said processing bath;

moving means for moving said object between said processing bath and said drying chamber by said supporting member;

first open and close means for opening and closing said lower opening of said drying chamber, said first open and close means being constructed so as to seal said drying chamber when in a closing condition thereof;

second open and close means for opening and closing said lower opening of said drying chamber, said second open and close means being constructed so as to close said opening while leaving a clearance allowing said supporting member to pass there-through when in a closing condition thereof;

means for filing said drying chamber with an atmosphere of organic solvent, said filling means being in said dying chamber; and

discharging means for discharging gas blown out from said filling means, said discharging means being arranged in a lower position than said filling means in said drying chamber.

13. A cleaning apparatus for cleaning an object to be processed, said apparatus comprising:

a processing bath for storing processing liquid in which said object is immersed, said processing bath having an upper portion defining an upper opening;

a drying chamber enclosed with a case arranged above said processing bath, said case having a lower portion defining a lower opening, said lower opening being connected with said upper opening between said case of said drying chamber and said processing bath;

a retaining member for retaining said object;

a supporting member for supporting said retaining member from said drying chamber'"'"'s side, said supporting member being inserted into said processing bath through said openings when said retaining member is disposed in said processing bath;

moving means for moving said object between said processing bath and said drying chamber by said supporting member;

open and close means for opening and closing said openings, said open and close means being constructed so as to seal said drying chamber in a first closing mode thereof and to close said lower opening of said drying chamber while leaving a clearance allowing said supporting member to pass there-through in a second closing mode thereof;

means for filling said drying chamber with an atmosphere of organic solvent, said filling means being in said dying chamber; and

discharging means for discharging gas blown out from said filling means, said discharging means being arranged in a lower position than said filling means in said drying chamber.