Use of pulsed-DC wafer bias for filling vias/trenches with metal in HDP physical vapor deposition

• US 6,051,114 A
• Filed: 06/23/1997
• Issued: 04/18/2000
• Est. Priority Date: 06/23/1997
• Status: Expired due to Term

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: Urbahn, John, Bourget, Lawrence P., Chen, Xing, Xu, Zheng, Yao, Tse-Yong, Ngan, Kenny King-tai
• Primary Examiner(s): MCDONALD, RODNEY GLENN
• Application Number:
  US08/880,467
• Time in Patent Office: 1,030 Days
• Field of Search: 204/192.1, 204/192.12, 204/192.13, 204/192.15, 204/192.17, 204/192.32, 204/192.33, 204/298.01, 204/298.02, 204/298.03, 204/298.31 , 204/298.32, 204/298.34, 204/298.38, 204/192.3, 204/298.06, 204/298.08
• US Class Current: 204/192.3
• CPC Class Codes: C23C 14/046 Coating cavities or hollow spaces, e.g. interior of tubes; Infiltration of porous substrates
• CPC Class Codes: C23C 14/34 Sputtering
• CPC Class Codes: C23C 14/357 Microwaves, e.g. electron cyclotron resonance enhanced sputtering
• CPC Class Codes: H01J 37/32623 Mechanical discharge control means
• CPC Class Codes: H01J 37/32678 Electron cyclotron resonance
• CPC Class Codes: H01J 37/32706 Polarising the substrate
• CPC Class Codes: H01J 37/34 operating with cathodic sputtering H01J37/36 takes precedence ; methods of cathodic sputtering C23C14/34
• CPC Class Codes: H01L 21/2855 by physical means, e.g. sputtering, evaporation H01L21/28518 - H01L21/28537 and H01L21/28568 take precedence
• CPC Class Codes: H01L 21/76877 Filling of holes, grooves or trenches, e.g. vias, with conductive material

Abstract

The present invention provides a method and apparatus for preferential PVD conductor fill in an integrated circuit structure. The present invention utilizes a high density plasma for sputter deposition of a conductive layer on a patterned substrate, and a pulsed DC power source capacitively coupled to the substrate to generate an ion current at the surface of the substrate. The ion current prevents sticking of the deposited material to the field areas of the patterned substrate, or etches deposited material from the field areas to eliminate crowning or cusping problems associated with deposition of a conductive material in a trench, hole or via formed on the substrate.

Claims

1. A method for filling one or more features on a substrate having a field area with a conductive material, comprising:

(a) generating a glow discharge in an inert gas atmosphere between a target and a patterned substrate to be processed;

(b) applying a negative DC bias to the target and a pulsed DC bias to the substrate having a DC positive voltage portion and a DC negative voltage portion to preferentially deposit a conductive material into the one or more features.

2. The method of claim 1 wherein the pulsed DC bias has a maximum negative voltage from about -20 V to about -200 V and a positive voltage from about 0.1 to about 30% of a total cycle.

3. The method of claim 1 wherein a barrier layer is deposited on the patterned substrate prior to applying the pulsed DC bias to the substrate.

4. The method of claim 1 wherein the conductive material comprises aluminum or copper.

5. The method of claim 1 wherein the conductive material is etched from field regions on the substrate.

6. The method of claim 1 wherein the inert gas atmosphere has a pressure from about 0.1 to about 1.5 mTorr.

7. A method for filling one or more features on a substrate having a field area with a conductive material, comprising:

(a) depositing a barrier layer on the substrate;

(b) generating a glow discharge in an inert gas atmosphere at a pressure from about 0.1 to about 5 mTorr between a target and the barrier layer by applying a negative bias to the target;

while

(c) applying a pulsed DC bias having a DC positive voltage portion and a DC negative voltage portion to the substrate at a maximum negative voltage from about -20 V to about -200 V to preferentially deposit aluminum or copper within the one or more features.

8. The method of claim 7, wherein the pulsed DC bias has a positive voltage from about 0.1 to about 30% of a total cycle.

9. The method of claim 7 wherein the glow discharge is generated by microwave power.

10. The method of claim 7 wherein the aluminum or copper is etched from field areas on the substrate.

11. An apparatus for filling one or more features on a substrate having a field area with a conductive material, comprising:

(a) a processing chamber which generates a glow discharge in an inert gas atmosphere between a target and a patterned substrate to be processed by a negative bias generator capacitively coupled to the target;

(b) a pulsed DC bias generator capacitively coupled to the substrate; and

(c) a system controller programmed to control application of a pulsed DC bias having a DC positive voltage portion and a DC negative voltage portion to the substrate with the pulsed DC bias generator to preferentially deposit a conductive material into the one or more features on the patterned substrate.

12. The apparatus of claim 11, wherein the pulsed DC bias generator provides a maximum negative voltage from about -20 V to at -200 V and a positive voltage from about 0.1 to about 30% of a total cycle.

13. The apparatus of claim 11, wherein the system controller is programmed to deposit a barrier layer on the patterned substrate prior to applying pulsed DC bias to the substrate.

14. The apparatus of claim 11, wherein the conductive material comprises aluminum or copper.

15. The apparatus of claim 11, wherein the system controller is programmed to etch conductive material deposited on field regions on the substrate.

16. The apparatus of claim 11, wherein the glow discharge is generated in an inert gas atmosphere having a pressure from about 0.1 to about 1.5 mTorr.

17. An apparatus for filling one or more features on a substrate having a field area with a conductive material, comprising:

(a) a processing chamber which generates a glow discharge in an inert gas atmosphere at a pressure from about 0.1 to about 5 mTorr between a target and a patterned substrate to be processed by applying a negative bias to the target;

(b) a pulsed DC bias generator capacitively coupled to the substrate at a maximum negative voltage from about -20 V to about -200 V; and

(c) a system controller programmed to deposit a barrier layer on a patterned dielectric layer on a substrate, and to apply a pulsed DC bias having a DC positive voltage portion and a DC negative voltage portion to the substrate with the pulsed DC bias generator to preferentially deposit a conductive material into the features on the patterned substrate.

18. The apparatus of claim 17 wherein the pulsed DC bias generator has a positive voltage from about 0.1 to about 30% of a total cycle.

19. The apparatus of claim 17 wherein the glow discharge is generated by microwave power.

20. A method for filling one or more features on a substrate having a field area with a conductive material, comprising:

(a) generating a glow discharge in an inert gas atmosphere between a target and a patterned substrate to be processed;

(b) applying a pulsed DC bias having a DC positive voltage portion and a DC negative voltage portion to the substrate independent of a bias applied to the target to preferentially deposit a conductive material into the one or more features.