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Magnetically enhanced microwave plasma generating apparatus

  • US 6,054,016 A
  • Filed: 02/27/1998
  • Issued: 04/25/2000
  • Est. Priority Date: 09/26/1997
  • Status: Expired due to Fees
First Claim
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1. A plasma generating apparatus comprising:

  • a waveguide for guiding microwaves;

    a vacuum vessel connected to the waveguide, having a means for supplying a gas to the vacuum vessel for discharging electrons and a means for evacuating the vacuum vessel;

    a dielectric member having a tube-like shape or a rod-like shape, extending into the vacuum vessel, and comprising means for emitting microwaves; and

    means, disposed outside of the vacuum vessel, for generating a first magnetic field inside the vacuum vessel such that the dielectric member is in a relatively weak magnetic field region of the first magnetic field.

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