Capacitive pressure sensor housing having a ceramic base

• US 6,058,780 A
• Filed: 12/05/1997
• Issued: 05/09/2000
• Est. Priority Date: 03/20/1997
• Status: Expired due to Fees

• Current Assignee: Alliedsignal Inc.
• Original Assignee: Alliedsignal Inc.
• Inventors: Lindberg, Laura J., Hughes, Grenville, Bernot, Anthony J.
• Primary Examiner(s): FELBER, JOSEPH LEON
• Application Number:
  US08/986,253
• Time in Patent Office: 886 Days
• Field of Search: 73/718, 73/724, 361/283.4
• US Class Current: 73/724
• CPC Class Codes: G01L 9/0075 using a ceramic diaphragm, e.g. alumina, fused quartz, glass

Abstract

A capacitive pressure sensor capsule has a housing with a ceramic cover sealingly attached to a ceramic base that defines an interior chamber. The sensing medium enters the chamber through an inlet port. A glass sensor is attached to an integral pillar that extends from the housing into the chamber. A conducting member extends through the pillar into the housing and carries the signals from the sensor. The combination of the glass sensor and ceramic housing provides high accuracy over a wide range of temperature, because the thermal coefficient of expansion of glass and ceramic are similar. Hermetic sealing of the sensor electrical circuitry ensures long term immunity from the sensed environment.

Claims

1. A capacitive pressure sensor capsule comprising:

a housing having a ceramic cover sealingly attached to a ceramic base to define an interior chamber, said housing further including an inlet port in fluid communication with a source of fluid pressure to be measured and said chamber, and further having a pillar member extending into said chamber;

a glass sensor attached to said pillar member and disposed in said chamber; and

at least one conducting member extending from said sensor and through said pillar member and into said housing.

2. The capsule of claim 1 wherein said cover and base are sealed together with an adhesive.

3. The capsule of claim 2 wherein said adhesive is glass frit.

4. The capsule of claim 1 wherein said glass sensor comprises:

a first diaphragm with a first electrode thereon;

a second diaphragm with a second electrode thereon; and

said first and second diaphragms bonded together so that said first and second electrodes cooperate to form a capacitor.

5. The capsule of claim 4 wherein said diaphragms are of different thicknesses.

6. The capsule of claim 4 wherein said diaphragms are bonded together with frit, said first diaphragm spaced from said second diaphragm to define a cavity therebetween.

7. The capsule of claim 6 wherein said cavity is evacuated to a preselected pressure.

8. The capsule of claim 6 wherein said cavity is open to ambient.

9. The capsule of claim 4 further comprising a crossover tab connecting said first electrode to a lead.

10. The capsule of claim 4 further comprising a ground shield on each of said diaphragms.

11. A capacitive pressure sensor capsule comprising:

a housing having a metal cover sealingly attached to a ceramic base to define an interior chamber, said housing further including an inlet port in fluid communication with a source of fluid pressure to be measured and said chamber, and further having a pillar member extending into said chamber;

a glass sensor attached to said pillar member and disposed in said chamber; and

at least one conducting member extending from said sensor and through said pillar member and into said housing.

12. The capsule of claim 11 wherein said cover and base are sealed together with an adhesive.

13. The capsule of claim 12 wherein said adhesive is glass frit.

14. The capsule of claim 11 wherein said glass sensor comprises:

a first diaphragm with a first electrode thereon;

a second diaphragm with a second electrode thereon; and

said first and second diaphragms bonded together so that said first and second electrodes cooperate to form a capacitor.

15. The capsule of claim 14 wherein said diaphragms are of different thicknesses.

16. The capsule of claim 15 wherein said diaphragms are bonded together with a glass frit, said first diaphragm spaced from said second diaphragm to define a cavity therebetween.

17. The capsule of claim 16 wherein said cavity is evacuated to a preselected pressure.

18. The capsule of claim 16 wherein said cavity is open to ambient.

19. The capsule of claim 14 further comprising a crossover tab connecting said first electrode to a lead.

20. The capsule of claim 14 further comprising a ground shield on each of said diaphragms.

21. A capacitive pressure sensor capsule comprising:

a housing having a polymer cover sealingly attached to a ceramic base to define an interior chamber, said housing further including an inlet port in fluid communication with a source of fluid pressure to be measured and said chamber, and further having a pillar member extending into said chamber;

a glass sensor attached to said pillar member and disposed in said chamber; and

at least one conducting member extending from said sensor and through said pillar member and into said housing.

22. The capsule of claim 21 wherein said cover and base are sealed together with an adhesive.

23. The capsule of claim 22 wherein said adhesive is a glass frit.

24. The capsule of claim 21 wherein said glass sensor comprises:

a first diaphragm with a first electrode thereon;

a second diaphragm with a second electrode thereon; and

said first and second diaphragms bonded together so that said first and second electrodes cooperate to form a capacitor.

25. The capsule of claim 24 wherein said diaphragms are of different thicknesses.

26. The capsule of claim 25 wherein said diaphragms are bonded together with a glass frit, said first diaphragm spaced from said second diaphragm to define a cavity therebetween.

27. The capsule of claim 26 wherein said cavity is evacuated to a preselected pressure.

28. The capsule of claim 26 wherein said cavity is open to ambient.

29. The capsule of claim 24 further comprising a crossover tab connecting said first electrode to a lead.

30. The capsule of claim 24 further comprising a ground shield on each of said diaphragms.