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Device for heating fluid controller

  • US 6,060,691 A
  • Filed: 04/20/1998
  • Issued: 05/09/2000
  • Est. Priority Date: 04/21/1997
  • Status: Expired due to Term
First Claim
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1. A device for heating a fluid controller which device comprises a pair of platelike side heaters pressed respectively against a pair of opposite side faces of a body of the fluid controller with an electrical insulating layer provided between each heater and each side face, a pair of side holding members each having a recessed portion for fitting the side heater therein and fastened to each other with screws to hold the controller body therebetween from opposite sides of the body, and a cushion member interposed between each side heater and a bottom face of the recessed portion for pressing the side heater against the controller body side face.

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