Apparatus and method for inspecting an LSI device in an assembling process, capable of detecting connection failure of individual flexible leads
First Claim
1. A apparatus for inspecting an LSI device in an assembly process, comprising:
- a stage for immobilizing an LSI chip thereon;
an assembly mechanism for controlling a lead so as to be connected to a predetermined portion of said LSI chip;
an image-data receiving mechanism for taking at least two types of image data including a first image data of a lead connection state immediately after said connection is made by said assembly mechanism and a second image data of a lead connection state after at least a portion of said lead is moved to a different position with respect to the LSI chip on the stage.
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Accused Products
Abstract
Disclosed is an apparatus and method for inspecting a connection state of a lead electrode to a bump after TAB (tape automated bonding). An LSI chip is immobilized on a stage. A flexible lead is held by a holding portion and connected to a bump. Above the chip, a CCD camera is provided. The stage is controlled to move up and down by a moving control mechanism. Each of the lead/bump connection states immediately after ILB (Inner lead bonding) is taken in the form of image data and defined as a first image data. A second image data of the lead/bump connection state is taken after the bump and lead are moved to different positions by moving the stage in order to change the position of the chip by means of the moving control mechanism. Whether or not the lead is duly connected to the bump is determined by the comparison of the first and second image data.
7 Citations
15 Claims
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1. A apparatus for inspecting an LSI device in an assembly process, comprising:
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a stage for immobilizing an LSI chip thereon; an assembly mechanism for controlling a lead so as to be connected to a predetermined portion of said LSI chip; an image-data receiving mechanism for taking at least two types of image data including a first image data of a lead connection state immediately after said connection is made by said assembly mechanism and a second image data of a lead connection state after at least a portion of said lead is moved to a different position with respect to the LSI chip on the stage. - View Dependent Claims (2, 3)
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4. An apparatus for inspecting an LSI device in an assembly process, comprising:
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a stage for immobilizing an LSI chip thereon; a holding portion for holding a plurality of flexible leads; assembling means for controlling said flexible leads so as to be connected to predetermined portions of said LSI chip; a camera for taking image data of a connection state between said flexible leads and said predetermined portions connected by said assembling means; and a control mechanism for changing a relative position between said stage and said holding portion in order to inspect said in order to inspect said connection state. - View Dependent Claims (5, 6, 7, 8, 9, 10)
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11. An apparatus for inspecting an LSI device in an assembly process, comprising:
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a stage for immobilizing an LSI chip thereon; assembling means for controlling a flexible lead so as to be connected to a predetermined portion of said LSI chip; a camera for taking a connection state of said lead to said predetermined portion in the form of image data; and a moving control mechanism for moving said chip and said camera or only said chip from a first position to a second position while maintaining at least a portion of said lead at the first position. - View Dependent Claims (12, 13)
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14. An apparatus for inspecting an LSI device in an assembly process, comprising:
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a stage for immobilizing an LSI chip thereon; assembling means having a holding portion for holding a flexible lead, for controlling said flexible lead so as to be connected to a predetermined portion of said LSI chip; a camera for providing image data related to the connection state of said lead to said predetermined portion; a moving control mechanism for setting a distance between said chip and said camera before a movement of said chip and camera to be equal to that set after the movement of said chip and camera while said holding portion is maintained in a position at which said lead is connected to said predetermined portion of said chip by said assembling means; wherein two types of image data are provided by said camera respectively before and after said moving control mechanism is functioned, and wherein the two types of image data are compared to each other to determine whether or not said lead is duly connected to said predetermined portion of said chip. - View Dependent Claims (15)
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Specification