Sensitivity calibrating method for detector of comparator
First Claim
1. A method for calibrating a sensitivity of a detector for a comparator comprising a table for an object to be put on and a first and a second detector for detecting a first and second opposing surface of the object, said first and second detector outputs measured value by multiplying a respectively detected position output by a sensitivity coefficient so that the comparator measures a distance between the first surface and the second surface of the object, the method comprising the steps of:
- providing a first reference gauge block and a second reference gauge block on the table, said first and second reference gauge block having different distance between the first and second surface and accurately known calibration value for the distance respectively;
substantially aligning the second surface position of each reference gauge block;
primarily measuring the first surface of each of said reference gauge blocks with said first detector;
providing a third reference gauge block and any one of said first and second reference gauge blocks, said third reference gauge block having different distance between the first and second surface with any one of said first and second reference gauge blocks and accurately known calibration value for the distance respectively;
substantially aligning the first surface position of said third reference gauge block and any one of said first and second blocks;
secondarily measuring the first surface of said third reference gauge block and any one of said first and second reference gauge block with said second detector;
calculating a first sensitivity coefficient for calibrating the sensitivity of said first detector from a predetermined formula according to a difference in the calibration value of said first and second reference gauge blocks and a difference in the measured value of said first and second reference gauge blocks measured in the primarily measuring step, and a second sensitivity coefficient for calibrating the sensitivity of said second detector from a predetermined formula according to a difference in the calibration value of said third reference gauge block and any one of said first and second reference gauge blocks and a difference in the measured value of said third reference gauge block and any one of said first and second reference gauge locks measured in the secondarily measuring step; and
renewing said first sensitivity coefficient and said second sensitivity coefficient calculated in the calculating step as a sensitivity coefficient of said first and second detectors.
1 Assignment
0 Petitions
Accused Products
Abstract
The object of present invention is to provide a sensitivity calibrating method for a detector of a comparator, which enables easy and highly accurate sensitivity calibration for a first and a second detector for measuring opposing position of an object. Heights of two pairs of reference gauge blocks, a first reference gauge block W1 and a second reference gauge block W2, and the second reference gauge block W2 and a third reference gauge block W3 is first measured, and thereafter, sensitivity coefficients for calibrating the sensitivity of an upper detector 10 and a lower detector 20 are calculated by applying the measured value to a predetermined formula. The calculation is repeated three times, and each value is renewed for the upper and the lower detector 10 and 20 respectively.
25 Citations
7 Claims
-
1. A method for calibrating a sensitivity of a detector for a comparator comprising a table for an object to be put on and a first and a second detector for detecting a first and second opposing surface of the object, said first and second detector outputs measured value by multiplying a respectively detected position output by a sensitivity coefficient so that the comparator measures a distance between the first surface and the second surface of the object, the method comprising the steps of:
-
providing a first reference gauge block and a second reference gauge block on the table, said first and second reference gauge block having different distance between the first and second surface and accurately known calibration value for the distance respectively; substantially aligning the second surface position of each reference gauge block; primarily measuring the first surface of each of said reference gauge blocks with said first detector; providing a third reference gauge block and any one of said first and second reference gauge blocks, said third reference gauge block having different distance between the first and second surface with any one of said first and second reference gauge blocks and accurately known calibration value for the distance respectively; substantially aligning the first surface position of said third reference gauge block and any one of said first and second blocks; secondarily measuring the first surface of said third reference gauge block and any one of said first and second reference gauge block with said second detector; calculating a first sensitivity coefficient for calibrating the sensitivity of said first detector from a predetermined formula according to a difference in the calibration value of said first and second reference gauge blocks and a difference in the measured value of said first and second reference gauge blocks measured in the primarily measuring step, and a second sensitivity coefficient for calibrating the sensitivity of said second detector from a predetermined formula according to a difference in the calibration value of said third reference gauge block and any one of said first and second reference gauge blocks and a difference in the measured value of said third reference gauge block and any one of said first and second reference gauge locks measured in the secondarily measuring step; and renewing said first sensitivity coefficient and said second sensitivity coefficient calculated in the calculating step as a sensitivity coefficient of said first and second detectors. - View Dependent Claims (2, 3, 4, 5, 6, 7)
-
Specification