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Micromechanical acceleration or coriolis rotation-rate sensor

  • US 6,062,082 A
  • Filed: 09/18/1997
  • Issued: 05/16/2000
  • Est. Priority Date: 06/30/1995
  • Status: Expired due to Term
First Claim
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1. Acceleration sensor, particularly a Coriolis rotation-rate sensor, havinga substrate (22) (base) that has a bearing point (24),a swinging structure (14, 16, 18, 20) rotatably suspended at the bearing point (24) for executing a planar swinging movement,means for generating the planar swinging movement of the swinging structure, andevaluating means for detecting an acceleration-stipulated deflection of the swinging structure, particularly for detecting a Coriolis acceleration;

  • and wherein the swinging structure (14, 16, 18,

         20) is connected to the bearing point (24) by springs (32,

         34) extending on a radius from the bearing point (24), and the springs (32,

         34) have a large height (h) in relation to their width (b), so interfering accelerations can already be mechanically suppressed directly at the acceleration sensor (10).

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