Micromechanical acceleration or coriolis rotation-rate sensor
First Claim
1. Acceleration sensor, particularly a Coriolis rotation-rate sensor, havinga substrate (22) (base) that has a bearing point (24),a swinging structure (14, 16, 18, 20) rotatably suspended at the bearing point (24) for executing a planar swinging movement,means for generating the planar swinging movement of the swinging structure, andevaluating means for detecting an acceleration-stipulated deflection of the swinging structure, particularly for detecting a Coriolis acceleration;
- and wherein the swinging structure (14, 16, 18,
20) is connected to the bearing point (24) by springs (32,
34) extending on a radius from the bearing point (24), and the springs (32,
34) have a large height (h) in relation to their width (b), so interfering accelerations can already be mechanically suppressed directly at the acceleration sensor (10).
1 Assignment
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Accused Products
Abstract
An acceleration sensor, particularly a Coriolis rotation-rate sensor, having a swinging structure that is movably suspended on a substrate (base) and can be deflected due to an acceleration effect, the sensor further having an arrangement for generating a planar swinging movement of the swinging structure, particularly a rotational swinging movement, and an evaluating arrangement for detecting a deflection of the swinging structure that is stipulated by acceleration, particularly for detecting a Coriolis acceleration. The swinging structure (12) is rotatably suspended so as to perform a planar swinging movement, and should perform a planar, rotational swinging movement.
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Citations
20 Claims
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1. Acceleration sensor, particularly a Coriolis rotation-rate sensor, having
a substrate (22) (base) that has a bearing point (24), a swinging structure (14, 16, 18, 20) rotatably suspended at the bearing point (24) for executing a planar swinging movement, means for generating the planar swinging movement of the swinging structure, and evaluating means for detecting an acceleration-stipulated deflection of the swinging structure, particularly for detecting a Coriolis acceleration; - and wherein the swinging structure (14, 16, 18,
20) is connected to the bearing point (24) by springs (32,
34) extending on a radius from the bearing point (24), and the springs (32,
34) have a large height (h) in relation to their width (b), so interfering accelerations can already be mechanically suppressed directly at the acceleration sensor (10). - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20)
- and wherein the swinging structure (14, 16, 18,
Specification