Process for bonding micromachined wafers using solder
First Claim
1. A method for bonding a mating surface of a semiconductor capping wafer to a mating surface of a semiconductor device wafer so as to enclose therebetween a micromachine on the device wafer, the method comprising the steps of:
- forming a solderable ring on the mating surface of the device wafer that circumscribes the micromachine on the device wafer;
forming a solderable layer on the capping wafer such that the mating surface of the capping wafer is entirely covered by the solderable layer;
depositing a solder alloy on at least one of the solderable ring and solderable layer;
mating the mating surfaces of the capping and device wafers such that the solder alloy is between the solderable ring and the solderable layer and such that the micromachine on the device wafer is received in a recess in the capping wafer;
heating the capping and device wafers to a temperature sufficient to reflow the solder alloy; and
thencooling the capping and device wafers to solder bond the capping wafer to the device wafer.
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Accused Products
Abstract
A method by which semiconductor wafers (10, 12) can be solder bonded to form a semiconductor device, such as a sensor with a micromachined structure (14). The method entails forming a solderable ring (18) on the mating surface of a device wafer (10), such that the solderable ring (18) circumscribes the micromachine (14) on the wafer (10). A solderable layer (20, 26, 28) is formed on a capping wafer (12), such that at least the mating surface (24) of the capping wafer (12) is entirely covered by the solderable layer (20, 26, 28). The solderable layer (20, 26, 28) can be formed by etching the mating surface (24) of the capping wafer (12) to form a recess (16) circumscribed by the mating surface (24), and then forming the solderable layer (26) to cover the mating surface (24) and the recess (16) of the capping wafer (12). Alternatively, the solderable layer (28) can be formed by depositing a solderable material to cover the entire lower surface of the capping wafer (12), patterning the resulting solderable layer (28) to form an etch mask on the capping wafer (12), and then to form the recess (16), such that the solderable layer (28) covers the mating surface (24) but not the surfaces of the recess (16).
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Citations
17 Claims
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1. A method for bonding a mating surface of a semiconductor capping wafer to a mating surface of a semiconductor device wafer so as to enclose therebetween a micromachine on the device wafer, the method comprising the steps of:
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forming a solderable ring on the mating surface of the device wafer that circumscribes the micromachine on the device wafer; forming a solderable layer on the capping wafer such that the mating surface of the capping wafer is entirely covered by the solderable layer; depositing a solder alloy on at least one of the solderable ring and solderable layer; mating the mating surfaces of the capping and device wafers such that the solder alloy is between the solderable ring and the solderable layer and such that the micromachine on the device wafer is received in a recess in the capping wafer; heating the capping and device wafers to a temperature sufficient to reflow the solder alloy; and
thencooling the capping and device wafers to solder bond the capping wafer to the device wafer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. A method of forming a resonating angular rate sensor by bonding a mating surface of a semiconductor capping wafer to a mating surface of a semiconductor device wafer so as to enclose therebetween a resonating angular rate micromachine on the device wafer, the method comprising the steps of:
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forming a bond pad on the device wafer and a metal crossunder interconnecting the bond pad and the micromachine; forming a solderable ring on the mating surface of the device wafer that circumscribes the micromachine on the device wafer; etching the mating surface of the capping wafer so as to form a recess therein; forming a solderable layer to cover the mating surface and the recess of the capping wafer; depositing a solder alloy on at least one of the solderable ring and solderable layer; mating the mating surfaces of the capping and device wafers such that the solder alloy is between the solderable ring and the solderable layer and such that the micromachine on the device wafer is received in the recess in the capping wafer; heating the capping and device wafers in a vacuum to a temperature sufficient to reflow the solder alloy; and
thencooling the capping and device wafers to solder bond the capping wafer to the device wafer, the solder alloy forming a hermetic seal between the capping and device wafers such that the micromachine is in a vacuum within the recess. - View Dependent Claims (11, 12, 13)
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14. A method of forming a resonating angular rate sensor by bonding a semiconductor capping wafer to a semiconductor device wafer so as to enclose therebetween a resonating angular rate micromachine on the device wafer, the method comprising the steps of:
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forming a bond pad on the device wafer and a metal crossunder interconnecting the bond pad and the micromachine; forming a solderable ring on the mating surface of the device wafer that circumscribes the micromachine on the device wafer; forming a solderable layer on the capping wafer such that the mating surface of the capping wafer is entirely covered by the solderable layer; patterning the solderable layer on the mating surface of the capping wafer so as to form an etch mask that circumscribes an interior surface region of the mating surface; etching the interior surface region so as to form a recess, such that the solderable layer covers the mating surface but not the recess; depositing a solder alloy on at least one of the solderable ring and solderable layer; mating the mating surfaces of the capping and device wafers such that the solder alloy is between the solderable ring and the solderable layer and such that the micromachine on the device wafer is received in the recess in the capping wafer; heating the capping and device wafers in a vacuum to a temperature sufficient to reflow the solder alloy; and
thencooling the capping and device wafers to solder bond the capping wafer to the device wafer, the solder alloy forming a hermetic seal between the capping and device wafers such that the micromachine is in a vacuum within the recess. - View Dependent Claims (15, 16, 17)
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Specification