Process for bonding micromachined wafers using solder

• US 6,062,461 A
• Filed: 06/03/1998
• Issued: 05/16/2000
• Est. Priority Date: 06/03/1998
• Status: Expired due to Term

• Current Assignee: Google LLC (Alphabet Inc.)
• Original Assignee: Delphi Technologies, Inc. (Aptiv PLC)
• Inventors: Beni, Ruth Ellen, Duffer, Anthony Alan, Sparks, Douglas Ray, Yeh, Shing, Jordan, Larry Lee
• Primary Examiner(s): Heinrich, Samuel M.
• Application Number:
  US09/116,815
• Time in Patent Office: 713 Days
• Field of Search: 228/122.1, 228/123.1, 228/124.6, 228/174, 228/208
• US Class Current: 228/123.1
• CPC Class Codes: B81C 1/00269 Bonding of solid lids or wafers to the substrate

Abstract

A method by which semiconductor wafers (10, 12) can be solder bonded to form a semiconductor device, such as a sensor with a micromachined structure (14). The method entails forming a solderable ring (18) on the mating surface of a device wafer (10), such that the solderable ring (18) circumscribes the micromachine (14) on the wafer (10). A solderable layer (20, 26, 28) is formed on a capping wafer (12), such that at least the mating surface (24) of the capping wafer (12) is entirely covered by the solderable layer (20, 26, 28). The solderable layer (20, 26, 28) can be formed by etching the mating surface (24) of the capping wafer (12) to form a recess (16) circumscribed by the mating surface (24), and then forming the solderable layer (26) to cover the mating surface (24) and the recess (16) of the capping wafer (12). Alternatively, the solderable layer (28) can be formed by depositing a solderable material to cover the entire lower surface of the capping wafer (12), patterning the resulting solderable layer (28) to form an etch mask on the capping wafer (12), and then to form the recess (16), such that the solderable layer (28) covers the mating surface (24) but not the surfaces of the recess (16).

Claims

1. A method for bonding a mating surface of a semiconductor capping wafer to a mating surface of a semiconductor device wafer so as to enclose therebetween a micromachine on the device wafer, the method comprising the steps of:

forming a solderable ring on the mating surface of the device wafer that circumscribes the micromachine on the device wafer;

forming a solderable layer on the capping wafer such that the mating surface of the capping wafer is entirely covered by the solderable layer;

depositing a solder alloy on at least one of the solderable ring and solderable layer;

mating the mating surfaces of the capping and device wafers such that the solder alloy is between the solderable ring and the solderable layer and such that the micromachine on the device wafer is received in a recess in the capping wafer;

heating the capping and device wafers to a temperature sufficient to reflow the solder alloy; and

then

cooling the capping and device wafers to solder bond the capping wafer to the device wafer.

2. A method as recited in claim 1, wherein at least one of the solderable ring and solderable layer comprises an adhesion layer, a diffusion barrier layer overlying the adhesion layer, and a solderable layer overlying the diffusion barrier layer.

3. A method as recited in claim 1, wherein bond pads are formed on the device wafer simultaneously with the solderable ring.

4. A method as recited in claim 1, wherein the solder alloy forms a hermetic seal between the capping and device wafers.

5. A method as recited in claim 1, wherein the heating step includes heating the capping and device wafers to a temperature of about 180°

C. to about 300°

C.

6. A method as recited in claim 1, wherein the solder alloy is deposited by at least one process chosen from the group consisting of plating, screen printing, evaporation and sputtering.

7. A method as recited in claim 1, wherein the mating surface of the capping wafer is limited to a peripheral surface region of the capping wafer.

8. A method as recited in claim 1, further comprising the steps of:

prior to forming the solderable layer, etching the mating surface of the capping wafer so as to form the recess and such that the recess is circumscribed by the mating surface; and

then

forming the solderable layer to cover the mating surface and the recess of the capping wafer.

9. A method as recited in claim 1, further comprising the steps of:

prior to forming the recess, forming the solderable layer to cover the entire mating surface of the capping wafer;

patterning the solderable layer on the mating surface of the capping wafer so as to form an etch mask on the capping wafer; and

then

etching the mating surface of the capping wafer so as to form the recess, such that the solderable layer covers the mating surface but not the recess.

10. A method of forming a resonating angular rate sensor by bonding a mating surface of a semiconductor capping wafer to a mating surface of a semiconductor device wafer so as to enclose therebetween a resonating angular rate micromachine on the device wafer, the method comprising the steps of:

forming a bond pad on the device wafer and a metal crossunder interconnecting the bond pad and the micromachine;

forming a solderable ring on the mating surface of the device wafer that circumscribes the micromachine on the device wafer;

etching the mating surface of the capping wafer so as to form a recess therein;

forming a solderable layer to cover the mating surface and the recess of the capping wafer;

depositing a solder alloy on at least one of the solderable ring and solderable layer;

mating the mating surfaces of the capping and device wafers such that the solder alloy is between the solderable ring and the solderable layer and such that the micromachine on the device wafer is received in the recess in the capping wafer;

heating the capping and device wafers in a vacuum to a temperature sufficient to reflow the solder alloy; and

then

cooling the capping and device wafers to solder bond the capping wafer to the device wafer, the solder alloy forming a hermetic seal between the capping and device wafers such that the micromachine is in a vacuum within the recess.

11. A method as recited in claim 10, wherein at least one of the solderable ring and solderable layer comprises an adhesion layer, a diffusion barrier layer overlying the adhesion layer, and a solderable layer overlying the diffusion barrier layer.

12. A method as recited in claim 10, wherein bond pads are formed simultaneously with the solderable ring on the device wafer.

13. A method as recited in claim 10, wherein the heating step includes heating the capping and device wafers to a temperature of about 180°

C. to about 300°

C.

14. A method of forming a resonating angular rate sensor by bonding a semiconductor capping wafer to a semiconductor device wafer so as to enclose therebetween a resonating angular rate micromachine on the device wafer, the method comprising the steps of:

forming a bond pad on the device wafer and a metal crossunder interconnecting the bond pad and the micromachine;

forming a solderable ring on the mating surface of the device wafer that circumscribes the micromachine on the device wafer;

forming a solderable layer on the capping wafer such that the mating surface of the capping wafer is entirely covered by the solderable layer;

patterning the solderable layer on the mating surface of the capping wafer so as to form an etch mask that circumscribes an interior surface region of the mating surface;

etching the interior surface region so as to form a recess, such that the solderable layer covers the mating surface but not the recess;

depositing a solder alloy on at least one of the solderable ring and solderable layer;

mating the mating surfaces of the capping and device wafers such that the solder alloy is between the solderable ring and the solderable layer and such that the micromachine on the device wafer is received in the recess in the capping wafer;

heating the capping and device wafers in a vacuum to a temperature sufficient to reflow the solder alloy; and

then

cooling the capping and device wafers to solder bond the capping wafer to the device wafer, the solder alloy forming a hermetic seal between the capping and device wafers such that the micromachine is in a vacuum within the recess.

15. A method as recited in claim 14, wherein at least one of the solderable ring and solderable layer comprises an adhesion layer, a diffusion barrier layer overlying the adhesion layer, and a solderable layer overlying the diffusion barrier layer.

16. A method as recited in claim 14, wherein bond pads are formed simultaneously with the solderable ring on the device wafer.

17. A method as recited in claim 14, wherein the heating step includes heating the capping and device wafers to a temperature of about 180°

C. to about 300°

C.