Process chamber isolation system in a deposition apparatus

• US 6,063,248 A
• Filed: 11/12/1998
• Issued: 05/16/2000
• Est. Priority Date: 11/12/1998
• Status: Expired due to Fees

• Current Assignee: HMT Technology Corp. (Western Digital Corporation)
• Original Assignee: HMT Technology Corp. (Western Digital Corporation)
• Inventors: Anoikin, Eugene V., Bourez, Allen
• Primary Examiner(s): Beck, Shrive
• Assistant Examiner(s): CHEN, BRET P
• Application Number:
  US09/191,485
• Time in Patent Office: 551 Days
• Field of Search: 204/298.01, 204/298.02, 204/298.04, 204/298.25, 118/719, 118/723 CB, 118/723 E, 118/50
• US Class Current: 204/298.25
• CPC Class Codes: C23C 14/564 Means for minimising impurities in the coating chamber such as dust, moisture, residual gases
• CPC Class Codes: C23C 14/568 Transferring the substrates through a series of coating stations C23C14/562 takes precedence

Abstract

An improvement in an apparatus having an external casing defining a processing chamber for deposition of a film on a substrate and an opening in the processing chamber through which a substrate is introduced for deposition is described. The improvement comprises an internal casing member moveably mounted within the processing chamber for movement between a first position which allows deposition onto the substrate to occur and a second position at which the casing is in sealing engagement with the opening to form an isolation chamber within the processing chamber and effective to isolate the substrate from processing chamber. The invention also includes a method for reducing cross-contamination between processing chambers in such an apparatus and a method for reducing particulate contamination to media prepared in such a deposition apparatus.

Claims

1. In an apparatus having an external casing defining a processing chamber for deposition of a film on a substrate and an opening in the processing chamber through which a substrate is introduced for deposition, an improvement comprising

an internal casing member moveably mounted within the processing chamber for movement between a first position which allows deposition onto the substrate to occur and a second position at which the casing is in sealing engagement with the opening to form an isolation chamber within the processing chamber and effective to isolate the substrate from processing chamber.

2. The apparatus of claim 1, wherein the processing chamber is at a deposition pressure when the internal casing member is in the first, deposition position and said apparatus further includes a first means for reducing the deposition pressure when the internal casing is in the first position.

3. The apparatus of claim 2, wherein the apparatus includes a second means for reducing the deposition pressure when the casing is in the second position, said first and second means for reducing disposed such that the first means for reducing is effective to change the deposition pressure in the processing chamber and the second means for reducing is effective to change the pressure in the isolation chamber.

4. The apparatus of claim 3, wherein said first means for reducing and said second means for reducing are vacuum pumps.

5. The apparatus of claim 1, where the processing chamber includes a means for depositing a film on the substrate.

6. The apparatus of claim 5, wherein the means for depositing is an ion beam and a deposition material.

7. The apparatus of claim 6, wherein the deposition material is an ionizable gas.

8. The apparatus of claim 5, wherein the means for depositing is a sputtering target and a voltage source.

9. The apparatus of claim 5, wherein the means for depositing is an electrode and an ionizable gas.

10. The apparatus of claim 1, wherein the substrate is a rigid, disc substrate.