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Device and method for detecting leakage of filter film

  • US 6,065,329 A
  • Filed: 06/24/1999
  • Issued: 05/23/2000
  • Est. Priority Date: 12/27/1996
  • Status: Expired due to Term
First Claim
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1. An apparatus for detecting leakage through a filtration membrane which comprises a gas-supplying means for supplying a gas to one of two spaces formed by partition with the filtration membrane, a gas-detecting means for measuring the degree of leakage of the gas into the other space, and a means for preventing the undesirable influence of the supplied gas on said gas-detecting means.

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