Semiconductor physical quantity sensor with stopper portion
First Claim
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1. A semiconductor sensor for detecting a physical quantity, comprising:
- a substrate having first and second anchor portions thereon;
a movable portion for being displaced generally in a direction parallel to a surface of the substrate by the physical quantity, the movable portion being disposed above the substrate and including a beam portion, a mass portion, and a movable electrode, the mass portion being supported by the first anchor portion through the beam portion;
a fixed electrode fixed to the substrate and facing the movable electrode of the mass portion; and
a stopper portion, for restricting displacement of the mass portion, the stopper portion being fixed to the substrate through the second anchor portion separately from the movable portion, the stopper portion being electrically connected to the beam portion through the first and second anchor portions.
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Abstract
A mass portion of a movable portion is supported by an anchor portion protruding from a substrate through a beam portion. A stopper portion fixed to the substrate through another anchor portion is disposed on a side opposite to the mass portion with respect to the beam portion to define a gap with the beam portion. The stopper portion is electrically connected to the beam portion through the anchor portions. Accordingly, the movable portion is restricted from being displaced in a direction generally parallel to a surface of the substrate, and a movable electrode of the movable portion is prevented from being attached to the fixed electrode.
113 Citations
30 Claims
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1. A semiconductor sensor for detecting a physical quantity, comprising:
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a substrate having first and second anchor portions thereon; a movable portion for being displaced generally in a direction parallel to a surface of the substrate by the physical quantity, the movable portion being disposed above the substrate and including a beam portion, a mass portion, and a movable electrode, the mass portion being supported by the first anchor portion through the beam portion; a fixed electrode fixed to the substrate and facing the movable electrode of the mass portion; and a stopper portion, for restricting displacement of the mass portion, the stopper portion being fixed to the substrate through the second anchor portion separately from the movable portion, the stopper portion being electrically connected to the beam portion through the first and second anchor portions. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 21, 22, 23, 24, 25, 26)
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13. A semiconductor sensor for detecting a physical quantity, comprising:
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a substrate having an anchor portion thereon; a movable portion including a beam portion, a mass portion, and a movable electrode, the movable portion being suspended above the substrate and being displaced by the physical quantity, the mass portion being supported by the anchor portion through the beam portion; a fixed electrode fixed to the substrate and facing the movable electrode, wherein the substrate has an electrode pattern facing the movable portion with a gap interposed therebetween, the electrode pattern being electrically connected to the movable portion through the anchor portion to have an electric potential equal to that of the movable portion. - View Dependent Claims (14, 15, 16)
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17. A semiconductor sensor for detecting a physical quantity, comprising:
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a substrate having an anchor portion protruding therefrom and an electrode pattern; a movable portion for being displaced by the physical quantity, the movable portion including a beam portion, a mass portion, and a movable electrode, and the movable portion being disposed above the substrate to face the electrode pattern with a first gap interposed therebetween, the mass portion being supported by the anchor portion through the beam portion; a fixed electrode fixed to the substrate and facing the movable electrode with a second gap interposed therebetween; and a stopper portion fixed to the substrate and facing the beam portion with a third gap interposed therebetween on a side opposite to the mass portion, wherein the stopper portion and the electrode pattern are electrically connected to the beam portion through the anchor portion to restrict displacement of the movable portion in directions generally parallel to a surface of the substrate and generally perpendicular to the surface. - View Dependent Claims (18, 19, 20)
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27. A semiconductor sensor for detecting a physical quantity, comprising:
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a substrate; a movable portion movably supported on the substrate and having a movable electrode; and a fixed portion fixed non-movably to the substrate and separated from the movable portion, the fixed portion including a fixed electrode facing the movable electrode to detect the physical quantity, and a stopper portion facing a part of the movable portion for restricting displacement of the movable portion, the stopper portion having an electric potential approximately equal to that of the movable portion. - View Dependent Claims (28, 29, 30)
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Specification