Method of manufacturing semiconductor devices using a crystallization promoting material

• US 6,066,518 A
• Filed: 07/21/1998
• Issued: 05/23/2000
• Est. Priority Date: 07/22/1997
• Status: Expired due to Term

• Current Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Original Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Inventors: Yamazaki, Shunpei
• Primary Examiner(s): Monin, Jr., Donald L.
• Assistant Examiner(s): MAI, ANH D
• Application Number:
  US09/119,779
• Time in Patent Office: 672 Days
• Field of Search: 117/2, 438/903, 438/491, 438/488, 438/166
• US Class Current: 438/166
• CPC Class Codes: G02F 1/13454 Drivers integrated on the active matrix substrate G02F1/136277 takes precedence
• CPC Class Codes: H01L 27/1277 using a crystallisation promoting species, e.g. local introduction of Ni catalyst

Abstract

In a method of manufacturing a semiconductor device, an insulating film having an opening is formed on an amorphous film 103 containing silicon therein. After catalytic elements are introduced from the opening, the amorphous film 103 is crystallized. Thereafter elements (phosphorus) selected from Group XV are introduced from the opening, and then a heat treatment is conducted to obtain a film having crystallinity. Thereafter, a portion of the film containing silicon into which the catalytic elements and phosphorus is introduced are removed.

Claims

1. A method of manufacturing a semiconductor device comprising the steps of:

forming a semiconductor film comprising amorphous silicon on an insulating surface;

forming a mask comprising an insulating material on said semiconductor film to expose a first portion of said semiconductor film;

selectively adding a crystallization promoting material to the first portion of said semiconductor film by using said mask, said crystallization promoting material being capable of promoting crystallization of said amorphous silicon;

heating said semiconductor film and said crystallization promoting material to crystallize said semiconductor film;

selectively adding a gettering material into the first portion of the crystallized semiconductor film by using said mask;

heating the crystallized semiconductor film added with said gettering material so that the crystallization promoting material contained in the crystallized semiconductor film is gettered by said first portion;

removing the first portion of the crystallized semiconductor film after the heating of the crystallized semiconductor film with said gettering material.

2. A method according to claim 1 wherein said gettering material comprises an element selected from the Group XV (15) elements of a periodic table.

3. A method according to claim 1 wherein said crystallization promoting material comprises an element selected from the group consisting of Ni, Co, Fe, Pd, Pt, Cu, and Au.

4. A method according to claim 1 wherein said gettering material comprises an element selected from the group consisting of P, N, As, Sb and Bi.

5. A method according to claim 1 wherein said gettering material is introduced by an ion implantation method.

6. A method according to claim 1 wherein said gettering material is introduced by an ion doping method.

7. A method according to claim 1 wherein said gettering material is added to said second portion at a concentration of 5×

10¹⁹ to 2×

10²¹ atoms/cm³.

8. A method according to claim 1 wherein the step of heating the crystallized semiconductor film and the gettering material is conducted at a temperature in a range of 500 to 700°

C.

34. A method according to claim 1, 9, 17 or 25 wherein said semiconductor device is an active matrix type EL display device.

35. A method according to claim 1, 9, 17 or 25 wherein said semiconductor device is a mobile computer.

36. A method according to claim 1, 9, 17 or 25 wherein said semiconductor device is a head mount display.

37. A method according to claim 1, 9, 17 or 35 wherein said semiconductor device is a navigation system.

38. A method according to claim 1, 9, 17 or 25 wherein said semiconductor device is a portable telephone.

39. A method according to claim 1, 9, 17 or 25 wherein said semiconductor device is a video camera.

9. A method of manufacturing a semiconductor device comprising the steps of:

forming a semiconductor film comprising amorphous silicon on an insulating surface;

forming a mask comprising an insulating material on said semiconductor film to expose a first portion of said semiconductor film;

selectively adding a crystallization promoting material to the first portion of said semiconductor film by using said mask;

first heating said semiconductor film and said crystallization promoting material to crystallize said semiconductor film;

selectively adding a group XV element into the first portion of the crystallized semiconductor film by using said mark;

second heating the crystallized semiconductor film added with said group XV element so that the crystallization promoting material contained in the crystallized semiconductor film is gettered by said first portion;

third heating the crystallized semiconductor film in a halogen containing atmosphere after said second heating in order to remove the first portion of the crystallized semiconductor film, and to reduce a concentration of said crystallization promoting material in the crystallized semiconductor film wherein said crystallization promoting material is removed through a section of the crystallized semiconductor film which is formed by the removal of said first portion.

10. A method according to claim 9 wherein said crystallization promoting material comprises an element selected from the group consisting of Ni, Co, Fe, Pd, Pt, Cu, and Au.

11. A method according to claim 9 wherein said group XV element is selected from the group consisting of P, N, As, Sb and Bi.

12. A method according to claim 9 wherein said group XV element is introduced by an ion implantation method.

13. A method according to claim 9 wherein said group XV element is introduced by an ion doping method.

14. A method according to claim 9 wherein said group XV element is added to said second portion at a concentration of 5×

10¹⁹ to 2×

10²¹ atoms/cm³.

15. A method according to claim 9 wherein the step of second heating is conducted at a temperature in a range of 500 to 700°

C.

16. A method according to claim 9 wherein said halogen containing atmosphere includes at least one halogen compound gas selected from the group consisting of HCl, HF, HBr, Cl₂, F₂, and Br₂.

17. A method of manufacturing a semiconductor device comprising the steps of:

forming a semiconductor film comprising amorphous silicon on an insulating surface;

forming a mask comprising an insulating material on said semiconductor film to expose a first portion of said semiconductor film;

selectively adding a crystallization promoting material to the first portion of said semiconductor film by using said mask, said crystallization promoting material being for promoting crystallization of said amorphous silicon;

first heating said semiconductor film and said crystallization promoting material to crystallize said semiconductor film;

selectively adding a group XV element into the first portion of the crystallized semiconductor film by using said mask;

second heating the crystallized semiconductor film added with said group XV element so that the crystallization promoting material contained in the crystallized semiconductor film is gettered by said first portion;

removing the first portion of the crystallized semiconductor film after the first heating of the crystallized semiconductor film with said group XV element; and

third heating the crystallized semiconductor film after the removing step in a halogen containing oxidizing atmosphere in order to remove the crystallization promoting material and said group XV element form the crystallized semiconductor film.

18. A method according to claim 17 wherein said crystallization promoting material comprises an element selected from the group consisting of Ni, Co, Fe, Pd, Pt, Cu, and Au.

19. A method according to claim 17 wherein said group XV element is selected from the group consisting of P, N, As, Sb and Bi.

20. A method according to claim 17 wherein said group XV element is introduced by an ion implantation method.

21. A method according to claim 17 wherein said group XV element is introduced by an ion doping method.

22. A method according to claim 17 wherein said group XV element is added to said second portion at a concentration of 5×

10¹⁹ to 2×

10²¹ atoms/cm³.

23. A method according to claim 17 wherein the step of second heating is conducted at a temperature in a range of 500 to 700°

C.

24. A method according to claim 17 wherein said halogen containing oxidizing atmosphere includes at least one halogen compound gas selected from the group consisting of HCl, HF, HBr, Cl₂, F₂, and Br₂.

25. A method of manufacturing a semiconductor device comprising the steps of:

forming a semiconductor film comprising amorphous silicon on an insulating surface;

forming a mask comprising an insulating material on said semiconductor film to expose a first portion of said semiconductor film;

selective adding a crystallization promoting material to the first portion of said semiconductor film by using said mask, said crystallization promoting material being capable of promoting crystallization of said amorphous silicon;

first heating said semiconductor film and said crystallization promoting material to crystallize said semiconductor film;

selectively adding a gettering material into the fist portion of the crystallized semiconductor film by using said mask;

second heating the crystallized semiconductor film added with said gettering material so that the crystallization promoting material contained in the crystallized semiconductor film is gettered by said first portion;

removing the first portion of the crystallized semiconductor film after the heating of the crystallized semiconductor film with said gettering material;

patterning the crystallized semiconductor film after said removing into at least one island comprising crystalline silicon;

forming an insulating layer covering said island; and

third heating said island with said insulating layer in a halogen containing oxidizing atmosphere.

26. A method according to claim 25 wherein said gettering material comprises an element selected from the Group XV (15) elements of a periodic table.

27. A method according to claim 25 wherein said crystallization promoting material comprises an element selected from the group consisting of Ni, Co, Fe, Pd, Pt, Cu, and Au.

28. A method according to claim 25 wherein said gettering material comprises an element selected from the group consisting of P, N, As, Sb and Bi.

29. A method according to claim 25 wherein said gettering material is introduced by an ion implantation method.

30. A method according to claim 25 wherein said gettering material is introduced by an ion doping method.

31. A method according to claim 25 wherein said gettering material is added to said second portion at a concentration of 5×

10¹⁹ to 2×

10²¹ atoms/cm³.

32. A method according to claim 25 wherein the step of second heating is conducted at a temperature in a range of 500 to 700°

C.

33. A method according to claim 25 wherein said halogen containing oxidizing atmosphere includes at least one halogen compound gas selected from the group consisting of HCl, HF, HBr, Cl₂, F₂, and Br₂.

40. A method of manufacturing a semiconductor device comprising the steps of:

forming a semiconductor film comprising amorphous silicon on an insulating surface;

forming a mask comprising an insulating material on said semiconductor film to expose a first portion of said semiconductor film;

selectively adding a crystallization promoting material to the first portion of said semiconductor film by using said mask, said crystallization promoting material being capable of promoting crystallization of said amorphous silicon;

heating said semiconductor film added with said crystallization promoting material to crystallize said semiconductor film;

selectively adding phosphorus into the first portion of the crystallized semiconductor film by using said mask;

heating the crystallized semiconductor film added with said phosphorus in order to absorb the crystallization promoting material by said first portion.

41. A method according to claim 40 further comprising a step of removing said first portion after the second heating.

42. A method according to claim 40 wherein said phosphorus is introduced by accelerating phosphorus ions.

43. A method according to claim 40 wherein said semiconductor device is an active matrix type EL display device.

44. A method according to claim 40 wherein said semiconductor device is a mobile computer.

45. A method according to claim 40 wherein said semiconductor device is a heat mount display.

46. A method according to claim 40 wherein said semiconductor device is a navigation system.

47. A method according to claim 40 wherein said semiconductor device is a portable telephone.

48. A method according to claim 40 wherein said semiconductor device is a video camera.