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Inspection method and wiring current observation method for semiconductor device

  • US 6,066,956 A
  • Filed: 11/18/1996
  • Issued: 05/23/2000
  • Est. Priority Date: 11/21/1995
  • Status: Expired due to Term
First Claim
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1. An observation method for wiring current in a semiconductor device comprising:

  • irradiating an infrared beam onto a region of a semiconductor device from at least one of;

    a back surface and a front surface of a chip; and

    detecting a variation in a current appearing at a predetermined terminal of said semiconductor device said variation being caused by irradiating the infrared beam, thereby observing a wiring current in said region, wherein the infrared beam has a wavelength of more than 1.24 μ

    m.

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