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Light valve device

  • US 6,067,062 A
  • Filed: 08/23/1991
  • Issued: 05/23/2000
  • Est. Priority Date: 09/05/1990
  • Status: Expired due to Term
First Claim
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1. A light valve substrate semiconductor device comprising:

  • a composite substrate including an optically transparent electrically insulating substrate, and a semiconductor single crystal thin film formed over the electrically insulating substrate and comprising a thinned single crystal wafer bonded to the electrically insulating substrate;

    a substantially optically transparent pixel array portion formed over the composite substrate and including a group of optically transparent pixel electrodes for exciting an electro-optical material and a group of switch elements formed in the semiconductor single crystal thin film for selectively energizing the group of optically transparent pixel electrodes;

    optically transparent isolating regions formed between the respective switching elements and the respective optically transparent pixel electrodes; and

    an opaque peripheral circuit portion formed in the semiconductor single crystal thin film for driving the pixel array portion.

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