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Light exposing device for manufacturing semiconductor device which further removes asymmetrical aberration

  • US 6,067,145 A
  • Filed: 03/06/1996
  • Issued: 05/23/2000
  • Est. Priority Date: 03/28/1995
  • Status: Expired due to Fees
First Claim
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1. A light-exposing device for making a semiconductor device, comprising:

  • a reticle having patterns to be exposed to light;

    a blind for controlling a light-exposing area of the reticle;

    a condenser lens for condensing light from a light source; and

    an optical system, placed between the blind and the reticle, comprising correction means for imaging the blind on the reticle in equi-magnification and for generating symmetrical aberrations within a predetermined range over the entire reticle.

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