Thermal actuator
First Claim
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1. A micromechanical thermal actuator having a bend axis arranged to curve upon actuation, said actuator comprising:
- a first material having a first coefficient of thermal expansion;
a serpentine heater element having a relatively lower coefficient of thermal expansion in thermal contact with said first material and adapted to heat said first material on demand;
said serpentine heater element having a majority of its length perpendicular to the bend axis of the actuator enabling the heater element to be elongated upon heating so as to accommodate the expansion of said first material.
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Abstract
An improved form of thermal actuator suitable for use in a MEMS device. The actuator includes a first material such as polytetrafluoroethylene having a high coefficient of thermal expansion and a serpentine heater material having a lower coefficient of thermal expansion in thermal contact with the first material and heating the first material on demand. The serpentine heater material is elongated upon heating so as to accommodate the expansion of the first material.
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Citations
7 Claims
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1. A micromechanical thermal actuator having a bend axis arranged to curve upon actuation, said actuator comprising:
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a first material having a first coefficient of thermal expansion; a serpentine heater element having a relatively lower coefficient of thermal expansion in thermal contact with said first material and adapted to heat said first material on demand; said serpentine heater element having a majority of its length perpendicular to the bend axis of the actuator enabling the heater element to be elongated upon heating so as to accommodate the expansion of said first material. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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Specification