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Thermal actuator

  • US 6,067,797 A
  • Filed: 07/10/1998
  • Issued: 05/30/2000
  • Est. Priority Date: 07/15/1997
  • Status: Expired due to Term
First Claim
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1. A micromechanical thermal actuator having a bend axis arranged to curve upon actuation, said actuator comprising:

  • a first material having a first coefficient of thermal expansion;

    a serpentine heater element having a relatively lower coefficient of thermal expansion in thermal contact with said first material and adapted to heat said first material on demand;

    said serpentine heater element having a majority of its length perpendicular to the bend axis of the actuator enabling the heater element to be elongated upon heating so as to accommodate the expansion of said first material.

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