Micromachined vibratory rate gyroscope
First Claim
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1. A microfabricated gyroscopic sensor, comprising:
- a substrate having a first plurality of electrode teeth;
a vibratory structure including a mass a second plurality of electrode teeth projecting from the mass and a suspension system connecting the mass to the substrate, the second plurality of electrode teeth interdigited with the first plurality of electrode teeth;
a drive system to cause the vibratory structure to oscillate relative to the substrate; and
a position sensor to measure a deflection of the mass caused by a Coriolis force;
wherein the first and second pluralities of electrode teeth have thicknesses substantially greater than their widths.
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Abstract
A microfabricated gyroscope to measure rotation about an axis parallel to the surface of the substrate. A voltage differential may be applied between pairs of electrode fingers to reduce the quadrature error. A microfabricated gyroscope includes a vibratory structure and interdigited electrodes having a high aspect ratio.
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Citations
4 Claims
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1. A microfabricated gyroscopic sensor, comprising:
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a substrate having a first plurality of electrode teeth; a vibratory structure including a mass a second plurality of electrode teeth projecting from the mass and a suspension system connecting the mass to the substrate, the second plurality of electrode teeth interdigited with the first plurality of electrode teeth; a drive system to cause the vibratory structure to oscillate relative to the substrate; and a position sensor to measure a deflection of the mass caused by a Coriolis force; wherein the first and second pluralities of electrode teeth have thicknesses substantially greater than their widths. - View Dependent Claims (2, 3, 4)
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Specification