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Method and apparatus for measuring the height of an object

  • US 6,069,701 A
  • Filed: 12/02/1997
  • Issued: 05/30/2000
  • Est. Priority Date: 12/04/1996
  • Status: Expired due to Term
First Claim
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1. A method of measuring the height of an object, comprising the steps of:

  • extracting data indicative of the height of the surface of the object by utilization of light;

    changing relative positions of a previously provided standard waveform with respect to a waveform obtained from said height data arbitrarily;

    calculating correlation coefficients of said waveform and said standard waveform at each of said changed positions; and

    deciding the height of an apex of the object from said calculated result.

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