Conductive ball attaching apparatus and method
First Claim
1. A method of attaching conductive balls onto a substrate, comprising the steps of:
- vacuum-absorbing and picking up conductive balls, which are accommodated in a conductive ball supply section, onto a lower surface of a suction head;
moving the suction head toward a position where the suction head is located above the substrate;
prior to accurately locating the suction head at said position, recognizing two positional recognition marks on the substrate by positioning first and second cameras simultaneously or successively at positions above the two positional recognition marks;
finding an accurate position of the substrate according to the result of the position recognition;
accurately positioning the suction head with respect to the substrate; and
moving the suction head toward and away from the substrate to attach the conductive balls onto electrodes provided on the substrate.
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Accused Products
Abstract
An apparatus and a method for attaching conductive balls by which the tact time necessary for the positional recognition of a substrate before the conductive balls are attached onto a substrate can be greatly reduced. A first camera and a second camera are moved together a suction head. After the suction head picks up the conductive balls in a conductive ball supply section, the suction head is moved to a position above a flux supply section so that flux can be attached to the conductive balls 10, and concurrently the first camera recognizes a positional recognition mark on a substrate. Then, during when the suction head is moved to a position above the substrate, the second camera recognizes another positional recognition mark on the substrate. In accordance with the positional recognition conducted above, the suction head is positioned accurately with respect to the substrate, and then the conductive balls are attached onto the electrodes on the substrate.
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Citations
10 Claims
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1. A method of attaching conductive balls onto a substrate, comprising the steps of:
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vacuum-absorbing and picking up conductive balls, which are accommodated in a conductive ball supply section, onto a lower surface of a suction head; moving the suction head toward a position where the suction head is located above the substrate; prior to accurately locating the suction head at said position, recognizing two positional recognition marks on the substrate by positioning first and second cameras simultaneously or successively at positions above the two positional recognition marks; finding an accurate position of the substrate according to the result of the position recognition; accurately positioning the suction head with respect to the substrate; and moving the suction head toward and away from the substrate to attach the conductive balls onto electrodes provided on the substrate. - View Dependent Claims (2, 3)
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4. A method of attaching conductive balls onto a substrate, comprising:
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vacuum-attaching a plurality of conductive balls onto a lower surface of a suction head; moving the suction head to a flux supply section; depositing flux from the flux supply section onto the conductive balls that are vacuum-attached to the suction head; observing a first mark formed on the substrate with a first camera during the flux-depositing step and thereby recognizing a position of said first mark; positioning a second camera above a second mark on the substrate, observing the second mark with the second camera and thereby recognizing a position of said second mark; and obtaining a position of the substrate based on the recognized positions of said first and second marks, positioning the suction head relative to the substrate based on the obtained position of the substrate, and attaching the conductive balls onto the substrate. - View Dependent Claims (5, 6)
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7. A method of attaching conductive balls onto a substrate, comprising:
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vacuum-attaching a plurality of conductive balls onto a lower surface of a suction head; moving the suction head to a flux supply section; depositing flux from the flux supply section onto the conductive balls that are vacuum-attached to the suction head; during said flux-depositing step, observing a first mark formed on the substrate with a first camera and observing a second mark formed on the substrate with a second camera, thereby recognizing a position of said first mark and a position of said second mark; and obtaining a position of the substrate based on the recognized positions of said first and second marks, positioning the suction head with respect to the substrate based on the obtained position of the substrate, and attaching the conductive balls onto the substrate. - View Dependent Claims (8, 9)
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10. A method of attaching conductive balls onto a substrate, comprising:
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vacuum-attaching a plurality of conductive balls onto a lower surface of a suction head; moving the suction head above the substrate; observing a first mark formed on the substrate with a first camera and observing a second mark formed on the substrate with a second camera, thereby recognizing a position of said first and second marks, said first and second marks being spaced a distance from one another, said first camera being secured to the suction head at a first location and said second camera being secured to the suction head at a second location, said first location being spaced from said second location; and obtaining a position of the substrate based on the recognized positions of said first and second marks, positioning the suction head with respect to the substrate based on the obtained position of the substrate, and attaching the conductive balls onto the substrate.
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Specification