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Conductive ball attaching apparatus and method

  • US 6,070,783 A
  • Filed: 04/21/1998
  • Issued: 06/06/2000
  • Est. Priority Date: 04/22/1997
  • Status: Expired due to Term
First Claim
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1. A method of attaching conductive balls onto a substrate, comprising the steps of:

  • vacuum-absorbing and picking up conductive balls, which are accommodated in a conductive ball supply section, onto a lower surface of a suction head;

    moving the suction head toward a position where the suction head is located above the substrate;

    prior to accurately locating the suction head at said position, recognizing two positional recognition marks on the substrate by positioning first and second cameras simultaneously or successively at positions above the two positional recognition marks;

    finding an accurate position of the substrate according to the result of the position recognition;

    accurately positioning the suction head with respect to the substrate; and

    moving the suction head toward and away from the substrate to attach the conductive balls onto electrodes provided on the substrate.

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