Alloy target, its fabrication, and regeneration processes
First Claim
1. An alloy target used to form a magneto-optical recording layer by a magnetron sputtering technique, which comprises 20 to 30 at % of at least one rare earth metal element selected from the group consisting of terbium, dysprosium, gadolinium, samarium, neodymium, holmium, thulium and erbium with a substantial balance of a transition metal element necessarily including at least one element selected from the group consisting of iron, cobalt and nickel, and has a substantially homogeneous sintered structure in sheet form having a thickness of at least 8 mm and a permeability of up to 3.
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Abstract
An alloy target comprises at least one rare earth metal element Tb, Dy, Gd, Sm, Nd, Ho, Tm, and Er with a substantial balance of a transition metal element such as Fe, Co and Ni, and has a substantially homogeneous sintered structure and a permeability of 3 or lower. The alloy target is fabricated by a process comprising steps of melting in a high-frequency furnace or crucible furnace, quenching, pulverization, and firing under pressure. After the alloy target has been used up, it is regenerated by mixing alloy powders (to be regenerated) obtained by the mechanical pulverization of the used-up target with the alloy powders obtained at the pulverization step of the aforesaid process to obtain a mixture, and firing the mixture under pressure.
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Citations
9 Claims
- 1. An alloy target used to form a magneto-optical recording layer by a magnetron sputtering technique, which comprises 20 to 30 at % of at least one rare earth metal element selected from the group consisting of terbium, dysprosium, gadolinium, samarium, neodymium, holmium, thulium and erbium with a substantial balance of a transition metal element necessarily including at least one element selected from the group consisting of iron, cobalt and nickel, and has a substantially homogeneous sintered structure in sheet form having a thickness of at least 8 mm and a permeability of up to 3.
Specification